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	Microwave performance dependence of BST thin film planar interdigitated varactors on different substrates
	Zhang, Jinwen ; Zhang, Hualiang ; Chen, Kevin Jing ; Lu, Sheng Guo ; Xu, Zhankui
	2007
关键词	BST thin film MgO LaAlO3 SrTiO3 MOS VARACTORS CAPACITORS RF CMOS VCO
英文摘要	This paper investigated the RF and microwave characterization dependence of BST (BaSrTiO3) planar interdigitated (PID) varactors on different substrates, such as MO (MgO), LAO (LaAlO3) and STO (SrTiO3). Double-layer Ba0.6Sr0.4TiO3/Ba0.4Sr0.6TiO3 thin film was deposited using reactive Pulsed Laser Deposition (PLD) and then varactors were fabricated. The results show that the capacitance, tunability and Q-factor of the PID varactors are strong dependent upon the properties of the substrates. The capacitance of the PID varactor on STO is much higher than those on MO and LAO substrates, and so its self-resonant frequency is the lowest. The tunability of the PID varactors on MO, LAO and STO are 45%, 50% and 30% respectively at 40V DC bias. The Q-factors of three PID varactors on MO, LAO and STO are different, i.e., MO > STO > LAO.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000248619100089&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1109/NEMS.2007.352109
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/261041]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Jinwen,Zhang, Hualiang,Chen, Kevin Jing,et al. Microwave performance dependence of BST thin film planar interdigitated varactors on different substrates. 2007-01-01.

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