A grating-based optical readout method for microcantilever biosensor

doi:10.1016/j.ijleo.2013.06.031

CORC > 北京大学 > 信息科学技术学院

	A grating-based optical readout method for microcantilever biosensor
	Wen, Feng ; Zhao, Yuejin ; Yu, Xiaomei ; Gong, Cheng ; Yang, Jiancheng
刊名	optik
	2014
关键词	Reflecting grating Microcantilever Diffraction Feedback balancing CCD SENSOR FIBER
DOI	10.1016/j.ijleo.2013.06.031
英文摘要	For measuring the deflections of the microcantilever biosensor, a reflective grating microcantilevers based on SDI were designed and fabricated, a high precision optical readout approach based on diffraction spectrum balancing feedback control was presented. The diffraction spectrum image was collected by a 12-bit digital area array monochrome CCD. According to the sum gray value of the image which subtracted each other at the balancing position and bending position to control a high precision motorized rotation stage revolve make the sum gray value remained in the balancing position always, then the motorized rotation stage revolving angle is just the cantilever bend angle. The resolution of motorized rotation stage is 35 x 10(-6) deg, the system practical measurement resolution is 1 x 10(-4) deg, that is to say, for a length of 250 mu m microcantilever, the tip measure resolution is up to 0.043 nm. Measurement results clearly demonstrate that this reflective grating microcantilever biosensor and this read out method have a great potential for biological and chemical applications. (C) 2013 Elsevier GmbH. All rights reserved.; Optics; SCI(E); EI; 1; ARTICLE; 200908@bit.edu.cn; 1; 84-88; 125
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/218809]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wen, Feng,Zhao, Yuejin,Yu, Xiaomei,et al. A grating-based optical readout method for microcantilever biosensor[J]. optik,2014.
APA	Wen, Feng,Zhao, Yuejin,Yu, Xiaomei,Gong, Cheng,&Yang, Jiancheng.(2014).A grating-based optical readout method for microcantilever biosensor.optik.
MLA	Wen, Feng,et al."A grating-based optical readout method for microcantilever biosensor".optik (2014).