Damage behaviours in LiNbO3 crystals induced by MeV Au+ irradiation | |
Shi, BR ; Lu, F ; Meng, MQ ; Wang, FX ; Li, W ; Liu, XD ; Wang, KM ; Wang, ZL | |
1998 | |
关键词 | damage distribution MeV ion irradiation LiNbO3 crystal ION-IMPLANTATION RADIATION-DAMAGE SILICON BOMBARDMENT DIFFUSION |
英文摘要 | MeV Au+ ions were implanted into LiNbO3 with different fluences ranging from 4 x 10(13) to 5 x 10(14) ions cm(-2) at room temperature. In order to investigate the influence of angle of incidence and cut direction of crystal on the damage profile, MeV Au+ irradiation in LiNbO3 was performed under different angles: 7 degrees, 45 degrees and 60 degrees with different cut directions: y-cut and z-cut. The damage behaviour was studied by the Rutherford backscattering (RBS)/channelling technique. A dechannelling analysis of multiple scattering has been made. The extracted damage profile is compared with the TRIM (Transport of Ions in Matter) prediction. The effect of the fluence, ion irradiation angle and crystal cut direction on the damage profile is discussed. (C) 1998 Elsevier Science B.V.; Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear; SCI(E); CPCI-S(ISTP); 3 |
语种 | 英语 |
DOI标识 | 10.1016/S0168-583X(97)00602-2 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/216251] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Shi, BR,Lu, F,Meng, MQ,et al. Damage behaviours in LiNbO3 crystals induced by MeV Au+ irradiation. 1998-01-01. |
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