An experimental study on high-temperature metallization for   micro-hotplate-based integrated gas sensors

doi:10.1016/S0925-4005(02)00070-9

CORC > 北京大学 > 信息科学技术学院

	An experimental study on high-temperature metallization for micro-hotplate-based integrated gas sensors
	Yan, GZ ; Tang, ZN ; Chan, PCH ; Sin, JKO ; Hsing, IM ; Wang, YY
刊名	sensors and actuators b chemical
	2002
关键词	MEMS metallization metal electrode TECHNOLOGY
DOI	10.1016/S0925-4005(02)00070-9
英文摘要	Metallization for MEMS devices for high-temperature applications is more complex than metallization for integrated circuits. The additional challenges for MEMS metallization come from the fact it can be attacked by the silicon etchant during micro-machining process and from thermal damage due to high-temperature post-metallization steps and device operation at high temperatures. This paper examines the metallization schemes for fabricating an integrated gas sensor with micro-hotplate operating at temperatures above 300 degreesC. Several types of composite multi-layer metal electrodes were investigated. The surface morphology of the metal electrodes after high-temperature processing were analyzed with optical and scanning electron microscopy (SEW and X-ray photo-electronic spectroscopy (XPS). The multi-layer metallization systems for micro-hotplate gas sensor applications were experimentally studied for suitability for high-temperature operation. Considering CMOS technology compatibility and long-term reliability at high temperature, the multi-layer metallizations: Al/Ti-W/Pt/SnO2 for the sensor and Al/Ti-W/polysilicon for the heater and temperature sensor are the best choices among the systems we have experimented. (C) 2002 Elsevier Science B.V. All rights reserved.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000178642900001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Chemistry, Analytical; Electrochemistry; Instruments & Instrumentation; SCI(E); EI; 24; ARTICLE; 1; 1-11; 86
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/208661]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yan, GZ,Tang, ZN,Chan, PCH,et al. An experimental study on high-temperature metallization for micro-hotplate-based integrated gas sensors[J]. sensors and actuators b chemical,2002.
APA	Yan, GZ,Tang, ZN,Chan, PCH,Sin, JKO,Hsing, IM,&Wang, YY.(2002).An experimental study on high-temperature metallization for micro-hotplate-based integrated gas sensors.sensors and actuators b chemical.
MLA	Yan, GZ,et al."An experimental study on high-temperature metallization for micro-hotplate-based integrated gas sensors".sensors and actuators b chemical (2002).