QQ客服 官方微博 反馈留言

	A doubly decoupled micromachined vibrating wheel gyroscope
	Zhao, Q.C. ; Liu, X.S. ; Lin, L.T. ; Guo, Z.Y. ; Cui, J. ; Chi, X.Z. ; Yang, Z.C. ; Yan, G.Z.
	2009
英文摘要	In this paper, a doubly decoupled vibrating wheel gyroscope with novel torsional sensing comb capacitors is presented. The doubly decoupled design and symmetrical structure can efficiently suppress the mechanical coupling of the gyroscope. Moreover, the symmetrically distributed proof masses make it immune from the linear accelerations. Both driving and sensing modes of the gyroscope are dominated by slide film air damping, so it can work even at atmospheric environment. The process for this gyroscope is also compatible with z-axis gyroscope, which makes it potential to realize low cost monolithic MIMU (miniature inertial measurement unit) without vacuum packaging. The gyroscope was fabricated and tested at atmosphere. The sensitivity is 3.1mV/??/s while the nonlinearity is 7.68?? with the full scale of 900??/s. The noise floor is 0.45??/s/Hz1/2. ?2009 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/SENSOR.2009.5285504
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153588]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhao, Q.C.,Liu, X.S.,Lin, L.T.,et al. A doubly decoupled micromachined vibrating wheel gyroscope. 2009-01-01.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。