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	3-D microinductor fabricated by using MEMS technology
	Fang, Dong-Ming ; Zhang, Hai-Xia ; Zhao, Xiao-Lin
	2008
关键词	SPIRAL INDUCTORS MONOLITHIC INDUCTORS RF ICS DESIGN CHIP
英文摘要	A high-performance three-dimensional (3-D) microinductor was fabricated by using MEMS technology. This inductor has an air core and copper coils. The measurement results show that this inductor has high quality (Q) factor over wide range of operating frequency and high f(res) (self-resonant frequency). The maximum Q-factor of this inductor is 38 (@6GHz) and the inductance is 1.81 nH at peak-Q frequency.; Engineering, Electrical & Electronic; Physics, Applied; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1109/ICSICT.2008.4735095
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153466]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Fang, Dong-Ming,Zhang, Hai-Xia,Zhao, Xiao-Lin. 3-D microinductor fabricated by using MEMS technology. 2008-01-01.

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