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	A Novel Integrated Micro-scale Closed Synthetic-jet-like Flow Field as Gas Lubrication in MEMS Devices
	Ding, Fei ; Yu, Wenxuan ; Yu, Tingting ; Ni, Chao ; Tang, Ruyan ; Wu, Wengang
	2009
关键词	micro flow field friction MEMS synthetic jet WEAR
英文摘要	The friction and wear problems have remarkably affected the reliability of Micro-Electro-Mechanical System (MEMS) devices. We present, for the first time, a novel integrated micro-scale closed synthetic-jet-like flow field, which provides a velocity-orientation-constant flow in an enclosure, being available as gas lubrication of the motion parts of MEMS devices to solve the friction problem. Based on a specific pyramid structure we work out, this novel method is applied to a practical rotary electrostatic side drive motor, and is theoretically proved to be effective.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000273161500132&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1109/NEMS.2009.5068644
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153272]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Ding, Fei,Yu, Wenxuan,Yu, Tingting,et al. A Novel Integrated Micro-scale Closed Synthetic-jet-like Flow Field as Gas Lubrication in MEMS Devices. 2009-01-01.

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