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	Tunable MEMS Capacitors Considering Deformation Factor
	Fang, Dong-Ming ; Zhang, Hai-Xia ; Zhao, Xiao-Lin
	2009
关键词	tunable capacitor Microelectromechanical System pull-in voltage deformation PULL-IN DESIGN ACTUATORS
英文摘要	For electrostatically actuated parallel-plate Microelectromechanical System (MEMS) capacitors traditional theory, pull-in occurs when the deflection of movable plate is one-third of the original air gap. In this we fabricated the parallel-plate tunable MEMS capacitors used WYKO NT1100 optical surface profiler to measure displacement related with deformation. The results show only the center of the movable plate nearly fully reached maximum displacement when pull-in effect occurs, that is, electrostatic force is nonlinear. The theoretical deviations of capacitance and pull-in voltage in traditional theory and in work are more than 2.6% and 1.3%.; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1109/NEMS.2009.5068519
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153263]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Fang, Dong-Ming,Zhang, Hai-Xia,Zhao, Xiao-Lin. Tunable MEMS Capacitors Considering Deformation Factor. 2009-01-01.

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