Comparison of the RF MEMS switches with dielectric layers on the   bridge&apos;s lower surface and on the transmission line

doi:10.1007/s11432-010-4179-2

CORC > 北京大学 > 信息科学技术学院

	Comparison of the RF MEMS switches with dielectric layers on the bridge's lower surface and on the transmission line
	Chen KenLe ; Zhang JinWen
刊名	science china information sciences
	2011
关键词	RF MEMS switch insertion loss fringing capacitance dielectric layer CAPACITIVE SWITCHES PHASE SHIFTERS TUNABLE FILTER 2-BIT BAND
DOI	10.1007/s11432-010-4179-2
英文摘要	Previously, we proposed that the dielectric layer of RF MEMS switch can be fabricated either on the transmission line, as traditional switches, or on the lower surface of the bridge. This paper presents a detailed comparison of the RF MEMS switches with different positions of dielectric layer. Through theoretically analyzing the physical model of fringing capacitance, it is revealed that different positions of dielectric layer can result in different switch capacitances. Therefore, the change of dielectric-layer position can reduce the switch capacitance and insertion loss when the bridge is much wider than t-line. The theoretical analysis is demonstrated by Maxwell 3D and HFSS simulation, showing that the insertion loss is reduced by around 13% when the bridge width is three times of transmission line width. Further, the influence of switch's structural parameters, such as dielectric material and dimensions of dielectric layer, on the differences between these two kinds of switches is discussed. To achieve high integration together with low-loss and low-actuation-voltage design, the novel switch with dielectric layer on bridge's lower surface can be expected to have broad applications in the future.; Computer Science, Information Systems; SCI(E); EI; 3; ARTICLE; 2; 396-406; 54
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152683]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Chen KenLe,Zhang JinWen. Comparison of the RF MEMS switches with dielectric layers on the bridge's lower surface and on the transmission line[J]. science china information sciences,2011.
APA	Chen KenLe,&Zhang JinWen.(2011).Comparison of the RF MEMS switches with dielectric layers on the bridge's lower surface and on the transmission line.science china information sciences.
MLA	Chen KenLe,et al."Comparison of the RF MEMS switches with dielectric layers on the bridge's lower surface and on the transmission line".science china information sciences (2011).