A single crystal silicon micro-Pirani vacuum gauge with high aspect   ratio structure

doi:10.1016/j.sna.2010.08.015

CORC > 北京大学 > 信息科学技术学院

	A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure
	Jiang, Wei ; Wang, Xin ; Zhang, Jinwen
刊名	sensors and actuators a physical
	2010
关键词	Micro-Pirani vacuum gauge Single crystal silicon High aspect ratio
DOI	10.1016/j.sna.2010.08.015
英文摘要	This paper presents a very simple micro-Pirani vacuum gauge made of single crystal silicon. It was fabricated by conventional bulk micromachining technology with only three masks. The gauge has 80 mu m thick bulk silicon as structure layer and dual heat sinks, which is very robust with very little internal stress and also provide large heat transfer area. Highly phosphorus ion doping at bottom of the anchors forms ohmic contact with Cr/Au leads. I-Vcurve shows good linear resistance characteristic of the single crystal silicon heater. The dynamic range of the Pirani vacuum gauge is 1-1000 Pa, and the average sensitivity in the dynamic range is 117 K/W/Pa. With an uncertainty of 1%, the resolution of the gauge is 12 Pa at 1000 Pa and 0.2 Pa at 4 Pa. (C) 2010 Elsevier B.V. All rights reserved.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000283671000023&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Instruments & Instrumentation; SCI(E); EI; 8; ARTICLE; 1; 159-163; 163
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152673]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Jiang, Wei,Wang, Xin,Zhang, Jinwen. A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure[J]. sensors and actuators a physical,2010.
APA	Jiang, Wei,Wang, Xin,&Zhang, Jinwen.(2010).A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure.sensors and actuators a physical.
MLA	Jiang, Wei,et al."A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure".sensors and actuators a physical (2010).