Chemisorption sensing and analysis using silicon cantilever sensor based   on n-type metal-oxide-semiconductor transistor

doi:10.1016/j.mee.2011.01.069

CORC > 北京大学 > 信息科学技术学院

	Chemisorption sensing and analysis using silicon cantilever sensor based on n-type metal-oxide-semiconductor transistor
	Wang, Jian ; Feng, Bo ; Wu, Wengang ; Huang, Ying
刊名	微电子工程
	2011
关键词	Cantilever sensor MOS transistor Chemisorption Surface stress Molecular interaction mechanism GAS-CHROMATOGRAPHY SURFACE STRESS MICROCANTILEVERS SPECTROMETRY SENSITIVITY EXPLOSIVES PLATFORM
DOI	10.1016/j.mee.2011.01.069
英文摘要	This paper presents a silicon cantilever sensor based on n-type metal-oxide-semiconductor transistor for chemical sensing and analysis using the chemisorption-induced surface stress sensing principle. The cantilever is along the < 1 0 0 > crystal orientation of the (1 0 0) silicon, and the transistor channel is parallel to as well as located at the rear part of the cantilever to obtain high stress sensitivity. The gold film deposited on the bottom surfaces of cantilevers is chemically functionalized with a self-assembled monolayer of 4-mercaptobenzoic acid via the Au-SH covalent bonding. The vapor phase chemical sensing experiments with acetone, ethanol, nitroethane and water vapor as targets are performed. The observed response differentiation implies that the molecular interaction mechanisms between different chemical molecules are different. (C) 2011 Elsevier B.V. All rights reserved.; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Optics; Physics, Applied; SCI(E); EI; 1; ARTICLE; 6; 1019-1023; 88
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152592]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Jian,Feng, Bo,Wu, Wengang,et al. Chemisorption sensing and analysis using silicon cantilever sensor based on n-type metal-oxide-semiconductor transistor[J]. 微电子工程,2011.
APA	Wang, Jian,Feng, Bo,Wu, Wengang,&Huang, Ying.(2011).Chemisorption sensing and analysis using silicon cantilever sensor based on n-type metal-oxide-semiconductor transistor.微电子工程.
MLA	Wang, Jian,et al."Chemisorption sensing and analysis using silicon cantilever sensor based on n-type metal-oxide-semiconductor transistor".微电子工程 (2011).