An experimental investigation on decoupling performance for a lateral   axis micromachined gyroscope with varying environmental parameters

doi:10.1007/s11431-011-4564-0

CORC > 北京大学 > 信息科学技术学院

	An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters
	Cui Jian ; Liu XueSong ; Guo ZhongYang ; Zhao QianCheng ; Lin LongTao ; Yang ZhenChuan ; Hao YiLong ; Yan GuiZhen
刊名	science china technological sciences
	2011
关键词	decoupling lateral axis gyroscope pressure temperature quadrature error MEMS GYROSCOPES SILICON
DOI	10.1007/s11431-011-4564-0
英文摘要	This paper carries out an experiment study of decoupling performance for a novel lateral axis micromachined gyroscope with varying environmental parameters. The non-ideal mathematical model for the coupling mechanism of the gyroscope is established through the gyro dynamic response matrix. The coupling components varying with ambient pressure and temperature induced by stiffness coupling, damping coupling and electrostatic force coupling are semi-analytically discussed. The overall coupling ratio is evaluated via experiments in the custom-built installation. The testing results show that the decoupling performance of the gyroscope is sensitive to the environmental parameters and all the non-ideal errors are determined as a function of ambient pressure and temperature. The coupling error varies from 0.05% to 0.25% within the pressure range of 100 Pa-100 kPa. The characteristics of coupling with temperature are measured from 20A degrees C to 100A degrees C with a variation from 0.35% to 0.41%. The results also indicate that within the range of measured ambient pressure and temperature, the minimum coupling ratio occurs at 100 Pa and room temperature. The overall performance of the gyroscope is tested under the pressure of about 2000 Pa and room temperature to achieve a relatively low coupling ratio. The scale factor is measured to be 7.8 mV (A degrees)(-1) s(-1) with nonlinearity about 0.45% in the full-scale range of 600 (A degrees) s(-1). The short-term bias stability is approximately 0.06 (A degrees) s(-1) (1 sigma) for 20 min with noise equivalent angular rate evaluated to be 0.077 (A degrees) s(-1) Hz(-1/2).; Engineering, Multidisciplinary; Materials Science, Multidisciplinary; SCI(E); EI; 0; ARTICLE; 12; 3415-3423; 54
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152553]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Cui Jian,Liu XueSong,Guo ZhongYang,et al. An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters[J]. science china technological sciences,2011.
APA	Cui Jian.,Liu XueSong.,Guo ZhongYang.,Zhao QianCheng.,Lin LongTao.,...&Yan GuiZhen.(2011).An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters.science china technological sciences.
MLA	Cui Jian,et al."An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters".science china technological sciences (2011).