Single-Walled Carbon Nanotube Pirani Gauges Prepared by DEP Assembly

doi:10.1109/TNANO.2013.2247623

CORC > 北京大学 > 信息科学技术学院

	Single-Walled Carbon Nanotube Pirani Gauges Prepared by DEP Assembly
	Yu, Fangzhou ; Zhang, Jinwen
刊名	ieee 纳米技术汇刊
	2013
关键词	Carbon nanotube (CNT) Pirani gauges dielectrophoretic (DEP) assembly pressure gauges suspended tubes PRESSURE SENSOR VACUUM GAUGES SCHOTTKY RANGE
DOI	10.1109/TNANO.2013.2247623
英文摘要	This paper reports the design, fabrication, and characteristics of the single-walled carbon nanotubes (SWNTs) Pirani gauge fabricated by dielectrophoretic assembly first which requires simple equipments and process, costs little, and operates at room temperature without limitation on the materials of electrode and substrate. Its theory and design were described in detail. The characteristics were measured and analyzed systematically such as current-voltage, resistance-temperature, thermal response, resistance-pressure, and power consumption properties. The results show that this SWNTs Pirani gauge has rapid thermal response of milliseconds and can operate at very low power consumption down to 15 nW. It reveals a wide linear dynamic range from 0.8 to 80 000 Pa and high sensitivity about 8 k Omega/Pa on average.; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; SCI(E); EI; 1; ARTICLE; 3; 323-329; 12
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152323]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yu, Fangzhou,Zhang, Jinwen. Single-Walled Carbon Nanotube Pirani Gauges Prepared by DEP Assembly[J]. ieee 纳米技术汇刊,2013.
APA	Yu, Fangzhou,&Zhang, Jinwen.(2013).Single-Walled Carbon Nanotube Pirani Gauges Prepared by DEP Assembly.ieee 纳米技术汇刊.
MLA	Yu, Fangzhou,et al."Single-Walled Carbon Nanotube Pirani Gauges Prepared by DEP Assembly".ieee 纳米技术汇刊 (2013).