A MEMS sandwich differential capacitive silicon-on-insulator   accelerometer

doi:10.1007/s00542-012-1726-3

CORC > 北京大学 > 信息科学技术学院

	A MEMS sandwich differential capacitive silicon-on-insulator accelerometer
	Zhang, Yangxi ; Yang, Gang ; Gao, Chengchen ; Hao, Yilong
刊名	microsystem technologies micro and nanosystems information storage and processing systems
	2013
DOI	10.1007/s00542-012-1726-3
英文摘要	A differential capacitive accelerometer with simple process is designed, simulated, and fabricated. To achieve a precision structure dimension with fewer processing steps, the silicon device layer transfer technology is being used to built a sandwich accelerometer based on a silicon-on-insulator (SOI) wafer, which was assembled by glass-si-glass multilayer anodic bonding. Deep reactive ion etching is being used to define symmetric beams and large mass block of equal thickness together in SOI device layer (up to 100 mu m) in a single step to avoid alignment error in double side process. An actual accelerometer which is designed for 50 g measure range is fabricated with six lithography steps. Measurement results show 0.1166 V/g sensitivity and 0.022 % nonlinearity error in +/- 1 g gravity static response test. The accelerometer also provides a power spectrum less than 10.49 mu Vrms/Hz(1/2) (89.97 mu g/Hz(1/2)) in a non-isolated laboratory environment with a capacitive interface circuit.; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; SCI(E); EI; 1; ARTICLE; 8; 1249-1254; 19
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152274]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Yangxi,Yang, Gang,Gao, Chengchen,et al. A MEMS sandwich differential capacitive silicon-on-insulator accelerometer[J]. microsystem technologies micro and nanosystems information storage and processing systems,2013.
APA	Zhang, Yangxi,Yang, Gang,Gao, Chengchen,&Hao, Yilong.(2013).A MEMS sandwich differential capacitive silicon-on-insulator accelerometer.microsystem technologies micro and nanosystems information storage and processing systems.
MLA	Zhang, Yangxi,et al."A MEMS sandwich differential capacitive silicon-on-insulator accelerometer".microsystem technologies micro and nanosystems information storage and processing systems (2013).