A high sensitivity and high linearity pressure sensor based on a   peninsula-structured diaphragm for low-pressure ranges

doi:10.1016/j.sna.2014.05.031

CORC > 北京大学 > 信息科学技术学院

	A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges
	Huang, Xian ; Zhang, Dacheng
刊名	sensors and actuators a physical
	2014
关键词	MEMS pressure sensor Peninsula-structured diaphragm Sensitivity and linearity FEM Sensor fabrication SIMULATION SILICON BOSS
DOI	10.1016/j.sna.2014.05.031
英文摘要	The trade-off between sensitivity and linearity has been the major problem in designing the piezo resistive pressure sensors for low pressure ranges. To resolve the problem, a novel peninsula-structured diaphragm with specially designed piezoresistors was proposed. Finite element method (FEM) was adopted for analyzing the sensor performance as well as comparisons with other sensor structures. In comparison to flat diaphragm, the proposed sensor design could achieve a sensitivity increase by 11.4%, nonlinearity reduction of 60% and resonance frequency increase of 41.8%. In addition, the modified peninsula-structured diaphragms featuring a center boss have been optimized to achieve ultra-low nonlinearities of 0.018%FFS and 0.07%FFS for the 5 kPa and 3 kPa pressure ranges respectively with higher sensitivities as compared to the CBM (cross beam membrane) and hollow stiffening structures. In accordance with the FEM results, the fabricated pressure sensor with the peninsula-structured diaphragm showed a sensitivity of 18.4 mV/V full-scale output and a nonlinearity error of 0.36%FSS in the pressure range 0-5 kPa. The proposed sensor structure is potentially a better choice for designing low pressure sensors. (C) 2014 Elsevier B.V. All rights reserved.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000340012700023&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Instruments & Instrumentation; SCI(E); EI; 12; ARTICLE; huangxian2010@pku.edu.cn; dchzhang@ime.pku.edu.cn; 176-189; 216
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152018]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Huang, Xian,Zhang, Dacheng. A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges[J]. sensors and actuators a physical,2014.
APA	Huang, Xian,&Zhang, Dacheng.(2014).A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges.sensors and actuators a physical.
MLA	Huang, Xian,et al."A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges".sensors and actuators a physical (2014).