3D nanostructure reconstruction based on the SEM imaging principle, and   applications

doi:10.1088/0957-4484/25/18/185705

CORC > 北京大学 > 信息科学技术学院

	3D nanostructure reconstruction based on the SEM imaging principle, and applications
	Zhu, Fu-Yun ; Wang, Qi-Qi ; Zhang, Xiao-Sheng ; Hu, Wei ; Zhao, Xin ; Zhang, Hai-Xia
刊名	nanotechnology
	2014
关键词	3D reconstruction SEM imaging principle nanostructures shape from shading statistical analysis SCANNING-ELECTRON-MICROSCOPY SURFACE SHAPE FABRICATION FIB/SEM
DOI	10.1088/0957-4484/25/18/185705
英文摘要	This paper addresses a novel 3D reconstruction method for nanostructures based on the scanning electron microscopy (SEM) imaging principle. In this method, the shape from shading (SFS) technique is employed, to analyze the gray-scale information of a single top-view SEM image which contains all the visible surface information, and finally to reconstruct the 3D surface morphology. It offers not only unobstructed observation from various angles but also the exact physical dimensions of nanostructures. A convenient and commercially available tool (NanoViewer) is developed based on this method for nanostructure analysis and characterization of properties. The reconstruction result coincides well with the SEM nanostructure image and is verified in different ways. With the extracted structure information, subsequent research of the nanostructure can be carried out, such as roughness analysis, optimizing properties by structure improvement and performance simulation with a reconstruction model. Efficient, practical and non-destructive, the method will become a powerful tool for nanostructure surface observation and characterization.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000334363600011&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; SCI(E); EI; PubMed; 4; ARTICLE; zhang-alice@pku.edu.cn; 18; 185705; 25
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/151794]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhu, Fu-Yun,Wang, Qi-Qi,Zhang, Xiao-Sheng,et al. 3D nanostructure reconstruction based on the SEM imaging principle, and applications[J]. nanotechnology,2014.
APA	Zhu, Fu-Yun,Wang, Qi-Qi,Zhang, Xiao-Sheng,Hu, Wei,Zhao, Xin,&Zhang, Hai-Xia.(2014).3D nanostructure reconstruction based on the SEM imaging principle, and applications.nanotechnology.
MLA	Zhu, Fu-Yun,et al."3D nanostructure reconstruction based on the SEM imaging principle, and applications".nanotechnology (2014).