Scanning probe lithography for nanoimprinting mould fabrication

doi:10.1088/0957-4484/17/12/034

CORC > 北京大学 > 化学与分子工程学院

	Scanning probe lithography for nanoimprinting mould fabrication
	Luo, G ; Xie, GY ; Zhang, YY ; Zhang, GM ; Zhang, YY ; Carlberg, P ; Zhu, T ; Liu, ZF
刊名	nanotechnology
	2006
关键词	DIP-PEN NANOLITHOGRAPHY SELF-ASSEMBLED MONOLAYERS HYDROGEN-PASSIVATED SILICON ATOMIC-FORCE MICROSCOPE IMPRINT LITHOGRAPHY NANOMETER-SCALE TUNNELING MICROSCOPE LOCAL OXIDATION NANOSTRUCTURES NANOFABRICATION
DOI	10.1088/0957-4484/17/12/034
英文摘要	We propose a rational fabrication method for nanoimprinting moulds by scanning probe lithography. By wet chemical etching, different kinds of moulds are realized on Si( 110) and Si( 100) surfaces according to the Si crystalline orientation. The structures have line widths of about 200 nm with a high aspect ratio. By reactive ion etching, moulds with patterns free from the limitation of Si crystalline orientation are also obtained. With closed-loop scan control of a scanning probe microscope, the length of patterned lines is more than 100 mu m by integrating several steps of patterning. The fabrication process is optimized in order to produce a mould pattern with a line width about 10 nm. The structures on the mould are further duplicated into PMMA resists through the nanoimprinting process. The method of combining scanning probe lithography with wet chemical etching or reactive ion etching (RIE) provides a resistless route for the fabrication of nanoimprinting moulds.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000238256300034&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; SCI(E); 18; ARTICLE; 12; 3018-3022; 17
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/313288]
专题	化学与分子工程学院
推荐引用方式 GB/T 7714	Luo, G,Xie, GY,Zhang, YY,et al. Scanning probe lithography for nanoimprinting mould fabrication[J]. nanotechnology,2006.
APA	Luo, G.,Xie, GY.,Zhang, YY.,Zhang, GM.,Zhang, YY.,...&Liu, ZF.(2006).Scanning probe lithography for nanoimprinting mould fabrication.nanotechnology.
MLA	Luo, G,et al."Scanning probe lithography for nanoimprinting mould fabrication".nanotechnology (2006).