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Enhanced electrical properties of epitaxial PZT films deposited by sol-gel method and crystallized by microwave irradiation
Zhang, YJ; Wang, ZJ; Bai, Y; Li, YZ; Liu, W1; Zhang, ZD
刊名JOURNAL OF ALLOYS AND COMPOUNDS
2018-08-15
卷号757页码:24-30
关键词Lead zirconate titanate Thin films Sol-gel method Microwave irradiation Electrical properties
ISSN号0925-8388
DOI10.1016/j.jallcom.2018.05.047
英文摘要Lead zirconate titanate Pb(Zr0.2Ti0.8)O-3 (PZT) thin films were deposited on Nb-doped SrTiO3 (NSTO) substrates by a sol-gel method and then crystallized by microwave irradiation. The effects of microwave irradiation on the electrical properties of PZT films were investigated in comparison with conventional annealing. The PZT films crystallized by microwave irradiation at 550 degrees C for only 10 min exhibited better electrical properties than those obtained by conventional heating at 550 degrees C for 45 min. The theoretical analysis based on the Schottky emission model reveals that microwave irradiation can increase the concentration of oxygen vacancies at the PZT/NSTO interface, thus reducing the effective built-in potential and depletion layer width at the PZT/NSTO interface to make PZT films exhibit better ferroelectric properties. (C) 2018 Elsevier B.V. All rights reserved.
学科主题Chemistry, Physical ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
语种英语
WOS记录号WOS:000433609100004
内容类型期刊论文
源URL[http://ir.imr.ac.cn/handle/321006/80022]  
专题金属研究所_中国科学院金属研究所
作者单位1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, 72 Wenhua Rd, Shenyang 110016, Liaoning, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.Shenyang Univ Technol, Sch Mat Sci & Engn, Shenyang 110870, Liaoning, Peoples R China
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GB/T 7714
Zhang, YJ,Wang, ZJ,Bai, Y,et al. Enhanced electrical properties of epitaxial PZT films deposited by sol-gel method and crystallized by microwave irradiation[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2018,757:24-30.
APA Zhang, YJ,Wang, ZJ,Bai, Y,Li, YZ,Liu, W,&Zhang, ZD.(2018).Enhanced electrical properties of epitaxial PZT films deposited by sol-gel method and crystallized by microwave irradiation.JOURNAL OF ALLOYS AND COMPOUNDS,757,24-30.
MLA Zhang, YJ,et al."Enhanced electrical properties of epitaxial PZT films deposited by sol-gel method and crystallized by microwave irradiation".JOURNAL OF ALLOYS AND COMPOUNDS 757(2018):24-30.
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