Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate

doi:10.1016/j.apsusc.2011.05.006

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	Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate
	Yu, Xinhong; Wang, Zhe; Yu, Sunyang; Ma, Dongge; Han, Yanchun
刊名	APPLIED SURFACE SCIENCE
	2011-09-01
卷号	257 期号:22 页码:9264-9268
关键词	Hot Lift-off Polymer Bonding Lithography
ISSN号	0169-4332
DOI	10.1016/j.apsusc.2011.05.006
英文摘要	Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of OFETs with polymeric dielectric on the flexible substrate was proposed. The desired polymeric semiconductor patterns were fabricated on the flat polydimethylsiloxane (PDMS) surface with a selective lift-off method we proposed previously. The isolated and well defined polymeric semiconductor patterns left on the flat PDMS surface can be further transferred to the gate polymeric dielectric surface by polymer bonding lithography due to the low interfacial energy of PDMS. The transistor fabricated with this 'dry' process has a higher field-effect mobility compared with that using spin coated semiconductor layer. (C) 2011 Elsevier B.V. All rights reserved.
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000293590300006
内容类型	期刊论文
源URL	[http://ir.iccas.ac.cn/handle/121111/73315]
专题	中国科学院化学研究所
通讯作者	Han, Yanchun
作者单位	Chinese Acad Sci, Changchun Inst Appl Chem, State Key Lab Polymer Phys & Chem, Changchun 130022, Peoples R China
推荐引用方式 GB/T 7714	Yu, Xinhong,Wang, Zhe,Yu, Sunyang,et al. Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate[J]. APPLIED SURFACE SCIENCE,2011,257(22):9264-9268.
APA	Yu, Xinhong,Wang, Zhe,Yu, Sunyang,Ma, Dongge,&Han, Yanchun.(2011).Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate.APPLIED SURFACE SCIENCE,257(22),9264-9268.
MLA	Yu, Xinhong,et al."Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate".APPLIED SURFACE SCIENCE 257.22(2011):9264-9268.