CORC  > 半导体研究所
Growth and structural properties of gan films on flat and vicinal sic(0001) substrates
Xie, MH; Cheung, SH; Zheng, LX; Tong, SY; Zhang, BS; Yang, H
刊名International journal of modern physics b
2002-01-20
卷号16期号:1-2页码:165-172
ISSN号0217-9792
通讯作者Xie, mh()
英文摘要Initial stage gan growth by molecular-beam epitaxy (mbe) on sic(0001) substrate is followed by in situ scanning tunneling microscopy. comparison is made between growth on nominally flat and vicinal substrate surfaces and the results reveal characteristic differences between the two. ex situ transmission electron microscopy (tem) and x-ray diffraction (xrd) rocking curve measurements of the films show lower density of defects and better structural quality of the vicinal film. we suggest the improved structural quality of the vicinal film is related to the characteristic difference in its initial stage nucleation and coalescence proccsses than that of the flat film.
WOS关键词MOLECULAR-BEAM EPITAXY
WOS研究方向Physics
WOS类目Physics, Applied ; Physics, Condensed Matter ; Physics, Mathematical
语种英语
出版者WORLD SCIENTIFIC PUBL CO PTE LTD
WOS记录号WOS:000173857900024
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2429223
专题半导体研究所
通讯作者Xie, MH
作者单位1.Univ Hong Kong, Dept Phys, Hong Kong, Hong Kong, Peoples R China
2.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Xie, MH,Cheung, SH,Zheng, LX,et al. Growth and structural properties of gan films on flat and vicinal sic(0001) substrates[J]. International journal of modern physics b,2002,16(1-2):165-172.
APA Xie, MH,Cheung, SH,Zheng, LX,Tong, SY,Zhang, BS,&Yang, H.(2002).Growth and structural properties of gan films on flat and vicinal sic(0001) substrates.International journal of modern physics b,16(1-2),165-172.
MLA Xie, MH,et al."Growth and structural properties of gan films on flat and vicinal sic(0001) substrates".International journal of modern physics b 16.1-2(2002):165-172.
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