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	X-ray diffraction determination of the fractions of hexagonal and twinned phases in cubic gan layers grown on (001)gaas substrate
	Qu, B; Zheng, XH; Wang, YT; Feng, ZH; Liu, SA; Lin, SM; Yang, H; Liang, JW
刊名	Thin solid films
	2001-07-23
卷号	392期号:1页码:29-33
关键词	Gallium nitride X-ray diffraction
ISSN号	0040-6090
通讯作者	Qu, b()
英文摘要	Being an established qualitative method for investigating presence of additional phases in single crystal materials, x-ray diffraction has been used widely to characterize their structural qualities and to improve the preparation techniques. here quantitative x-ray diffraction analysis is described which takes into account diffraction geometry and multiplicity factors. using double-crystal x-ray four-circle diffractometer, pole figures of cubic (002), {111} and hexagonal {10 (1) over bar0} and reciprocal space mapping were measured to investigate the structural characters of mixed phases and to obtain their diffraction geometry and multiplicity factors. the fractions of cubic twins and hexagonal inclusions were calculated by the integrated intensities of rocking curves of cubic (002), cubic twin {111}, hexagonal {10 (1) over bar0} and hexagonal {10 (1) over bar1}. without multiplicity factors, the calculated results are portions of mixed phases in only one {111} plane of cubic gan. diffraction geometry factor can eliminate the effects of omega and x angles on the irradiated surface areas for different scattered planes. (c) 2001 elsevier science b.v. all rights reserved.
WOS关键词	EPITAXY ; RATIO
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
语种	英语
出版者	ELSEVIER SCIENCE SA
WOS记录号	WOS:000169686600005
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2428987
专题	半导体研究所
通讯作者	Qu, B
作者单位	1.Chinese Acad Sci, Inst Semicond, State Key Labs Integrated Optoelect, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Natl Res Ctr Optoelect Technol, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Qu, B,Zheng, XH,Wang, YT,et al. X-ray diffraction determination of the fractions of hexagonal and twinned phases in cubic gan layers grown on (001)gaas substrate[J]. Thin solid films,2001,392(1):29-33.
APA	Qu, B.,Zheng, XH.,Wang, YT.,Feng, ZH.,Liu, SA.,...&Liang, JW.(2001).X-ray diffraction determination of the fractions of hexagonal and twinned phases in cubic gan layers grown on (001)gaas substrate.Thin solid films,392(1),29-33.
MLA	Qu, B,et al."X-ray diffraction determination of the fractions of hexagonal and twinned phases in cubic gan layers grown on (001)gaas substrate".Thin solid films 392.1(2001):29-33.

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