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Improvement of stoichiometry in semi-insulating gallium arsenide grown under microgravity
Lin, LY; Zhong, XR; Chen, NF
刊名Journal of crystal growth
1998-07-01
卷号191期号:3页码:586-588
关键词Si-gaas Stoichiometry Microgravity
ISSN号0022-0248
通讯作者Chen, nf(nfchen@red.semi.ac.cn)
英文摘要A semi-insulating (si) gaas single crystal was recently grown in a retrievable satellite. the average etch pit density (epd) of dislocations in the crystal revealed by molten koh is 2.0 x 10(4) cm(-2), and the highest epd is 3.1 x 10(4) cm(-2) this result indicates a quite good homogenity of the epd which is much better than the ground-grown crystals. a similar better homogenity of the stoichiometry i.e., the [as]/([as] + [ga]) ratio has been found in the space-grown si-gaas single crystal studied nondestructively using a new mapping method based upon x-ray bond diffraction. the average stoichiometry in the space-grown crystal is 0.50007 with mean-square deviation of 6x10(-6), while the average stoichiometry in ground-grown si-gaas crystal is more than 0.50010. (c) 1998 elsevier science b.v. all rights reserved.
WOS关键词DEFECTS
WOS研究方向Crystallography ; Materials Science ; Physics
WOS类目Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
语种英语
出版者ELSEVIER SCIENCE BV
WOS记录号WOS:000075032500038
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2428591
专题半导体研究所
通讯作者Chen, NF
作者单位Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Lin, LY,Zhong, XR,Chen, NF. Improvement of stoichiometry in semi-insulating gallium arsenide grown under microgravity[J]. Journal of crystal growth,1998,191(3):586-588.
APA Lin, LY,Zhong, XR,&Chen, NF.(1998).Improvement of stoichiometry in semi-insulating gallium arsenide grown under microgravity.Journal of crystal growth,191(3),586-588.
MLA Lin, LY,et al."Improvement of stoichiometry in semi-insulating gallium arsenide grown under microgravity".Journal of crystal growth 191.3(1998):586-588.
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