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The effect of different oriented sapphire substrates on the growth of polar and non-polar znmgo by mocvd
Shi, K.; Yang, A. L.; Wang, J.; Song, H. P.; Xu, X. Q.; Sang, L.; Wei, H. Y.; Yang, S. Y.; Liu, X. L.; Zhu, Q. S.
刊名Journal of crystal growth
2011
卷号314期号:1页码:39-42
关键词Metal organic chemical vapor deposition Sapphire Zinc compounds Semiconducting ii-vi materials
ISSN号0022-0248
DOI10.1016/j.jcrysgro.2010.11.095
通讯作者Shi, k.(shikai@semi.ac.cn)
英文摘要Polar and non-polar znmgo were synthesized on different crystallographic planes (c-, r- and m-planes) of sapphire (al(2)o(3)) substrates by metal organic chemical vapor deposition, respectively. under the same experimental condition, polar znmgo nanorods were obtained on c-al(2)o(3) substrate whereas non-polar znmgo thin films were obtained on r- and m-al(2)o(3) substrates. the surface morphology was significantly influenced by the competition of the preferable growth directions on different sapphire substrates. on c-al(2)o(3) substrate, znmgo nanorods were vertically well-aligned with typical lengths in the range 330-360 nm. on r- and m-al(2)o(3) substrates, however, znmgo thin films with flat surfaces were obtained, whose thickness were 150 and 20 nm, respectively. under the same condition, the c-znmgo deposited on c-al(2)o(3) substrate has the maximum growth velocity (11 nm/nim), followed by a-znmgo deposited on r-al(2)o(3) substrate (5 nm/min), and the m-znmgo deposited on m-al(2)o(3) substrate has the minimum one (0.67 nm/min). the near-band-edge (nbe) emission in photoluminescence (pl) spectra shows a clear blueshift and a slight broadening compared with that of pure zno samples, which suggest that the mg content has successfully incorporated into zno. the different energy blueshifts (67 mev and 98 mev) of the nbe emission demonstrate that a-znmgo deposited on r-al(2)o(3) substrate has higher mg incorporation efficiency than c-znmgo on c-al(2)o(3) substrate. (c) 2010 elsevier b.v. all rights reserved.
WOS关键词VAPOR-PHASE EPITAXY ; OPTICAL-PROPERTIES ; ZNO NANORODS ; RAMAN-SCATTERING ; M-PLANE ; FILMS ; PHOTOLUMINESCENCE ; DEPOSITION ; NANOWIRES ; FIELDS
WOS研究方向Crystallography ; Materials Science ; Physics
WOS类目Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
语种英语
出版者ELSEVIER SCIENCE BV
WOS记录号WOS:000286853400008
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2428409
专题半导体研究所
通讯作者Shi, K.
作者单位Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Shi, K.,Yang, A. L.,Wang, J.,et al. The effect of different oriented sapphire substrates on the growth of polar and non-polar znmgo by mocvd[J]. Journal of crystal growth,2011,314(1):39-42.
APA Shi, K..,Yang, A. L..,Wang, J..,Song, H. P..,Xu, X. Q..,...&Wang, Z. G..(2011).The effect of different oriented sapphire substrates on the growth of polar and non-polar znmgo by mocvd.Journal of crystal growth,314(1),39-42.
MLA Shi, K.,et al."The effect of different oriented sapphire substrates on the growth of polar and non-polar znmgo by mocvd".Journal of crystal growth 314.1(2011):39-42.
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