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Epitaxial growth of ge0.975sn0.025 alloy films on si(001) substrates by molecular beam epitaxy
Su Shao-Jian; Wang Wei; Zhang Guang-Ze; Hu Wei-Xuan; Bai An-Qi; Xue Chun-Lai; Zuo Yu-Hua; Cheng Bu-Wen; Wang Qi-Ming
刊名Acta physica sinica
2011-02-01
卷号60期号:2页码:5
关键词Gesn Ge Molecular beam epitaxy Epitaxial growth
ISSN号1000-3290
通讯作者Cheng bu-wen(cbw@red.semi.ac.cn)
英文摘要Ge0.975sn0.025 alloy films have been grown on si(001) substrates by molecular beam epitaxy with high-quality ge films as buffer layers. the alloys have high crystalline quality without sn surface segregation, determined by double crystal x-ray diffraction and rutherford backscattering spectra measurement. in addition, the ge0.975sn0.025 alloy has rather good thermal stability at 500 degrees c, which makes it possible to be used in si-based optoelectronic devices.
WOS关键词SEMICONDUCTORS ; GE(001)2X1
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
语种英语
出版者CHINESE PHYSICAL SOC
WOS记录号WOS:000287947000106
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2428244
专题半导体研究所
通讯作者Cheng Bu-Wen
作者单位Chinese Acad Sci, State Key Lab Integrated Optoelect, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Su Shao-Jian,Wang Wei,Zhang Guang-Ze,et al. Epitaxial growth of ge0.975sn0.025 alloy films on si(001) substrates by molecular beam epitaxy[J]. Acta physica sinica,2011,60(2):5.
APA Su Shao-Jian.,Wang Wei.,Zhang Guang-Ze.,Hu Wei-Xuan.,Bai An-Qi.,...&Wang Qi-Ming.(2011).Epitaxial growth of ge0.975sn0.025 alloy films on si(001) substrates by molecular beam epitaxy.Acta physica sinica,60(2),5.
MLA Su Shao-Jian,et al."Epitaxial growth of ge0.975sn0.025 alloy films on si(001) substrates by molecular beam epitaxy".Acta physica sinica 60.2(2011):5.
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