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	High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre
	Zhu Yu1; Xu Xue-Jun1; Li Zhi-Yong1; Zhou Liang1; Han Wei-Hua2; Fan Zhong-Chao2; Yu Yu-De1; Yu Jin-Zhong1
刊名	Chinese physics b
	2010
卷号	19期号:1页码:5
关键词	Grating coupler Silicon-on-insulator Coupling efficiency Bandwidth
ISSN号	1674-1056
通讯作者	Yu jin-zhong(jzyu@semi.ac.cn)
英文摘要	A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator (soi) nanophotonic waveguide and fibre is designed and fabricated. coupling efficiencies of 46% and 25% at a wavelength of 1.55 mu m are achieved by simulation and experiment, respectively. an optical 3 db bandwidth of 45 nm from 1530 nm to 1575 nm is also obtained in experiment. numerical calculation shows that a tolerance to fabrication error of 10 nm in etch depth is achievable. the measurement results indicate that the alignment error of +/-2 mu m results in less than 1 db additional coupling loss.
WOS关键词	SILICON-ON-INSULATOR ; OPTICAL-FIBERS ; RESONATORS
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000273586000064
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2428074
专题	半导体研究所
通讯作者	Yu Jin-Zhong
作者单位	1.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Zhu Yu,Xu Xue-Jun,Li Zhi-Yong,et al. High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre[J]. Chinese physics b,2010,19(1):5.
APA	Zhu Yu.,Xu Xue-Jun.,Li Zhi-Yong.,Zhou Liang.,Han Wei-Hua.,...&Yu Jin-Zhong.(2010).High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre.Chinese physics b,19(1),5.
MLA	Zhu Yu,et al."High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre".Chinese physics b 19.1(2010):5.

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