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	Pseudo-rhombus-shaped subwavelength crossed gratings of gaas for broadband antireflection
	Chen Xi1; Fan Zhong-Chao2; Zhang Jing1; Song Guo-Feng1; Chen Liang-Hui1
刊名	Chinese physics letters
	2010-12-01
卷号	27期号:12页码:3
ISSN号	0256-307X
DOI	10.1088/0256-307x/27/12/124210
通讯作者	Chen xi(chenxi@semi.ac.cn)
英文摘要	Holographic lithography coupled with the nonlinear response of photoresist to the exposure is adopted to fabricate porous photoresist (pr) mask. conventional dot pr mask is also generated, and both patterns are transferred into a underlying gaas substrate by the optimal dry etching process to obtain tapered subwavelength crossed gratings (swcgs) to mimic the moth-eye structure. in comparison of the experiment and simulation, the closely-packed pseudo-rhombus-shaped gaas swcgs resulting from the porous mask outperforms the conical counterpart which comes from the dot mask, and achieves a reported lowest mean spectral reflectance of 1.1%.
WOS关键词	SILICON ; REFLECTION ; ABSORPTION ; LIGHT
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000285390300028
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2428053
专题	半导体研究所
通讯作者	Chen Xi
作者单位	1.Chinese Acad Sci, Inst Semicond, Lab Nanooptoelect, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Chen Xi,Fan Zhong-Chao,Zhang Jing,et al. Pseudo-rhombus-shaped subwavelength crossed gratings of gaas for broadband antireflection[J]. Chinese physics letters,2010,27(12):3.
APA	Chen Xi,Fan Zhong-Chao,Zhang Jing,Song Guo-Feng,&Chen Liang-Hui.(2010).Pseudo-rhombus-shaped subwavelength crossed gratings of gaas for broadband antireflection.Chinese physics letters,27(12),3.
MLA	Chen Xi,et al."Pseudo-rhombus-shaped subwavelength crossed gratings of gaas for broadband antireflection".Chinese physics letters 27.12(2010):3.

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