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	Formation of high reflective ni/ag/ti/au contact on p-gan
	Jiang, Fang1,2,3; Cai, Li-E1,2,3; Zhang, Jiang-Yong1,2,3,4; Zhang, Bao-Ping1,2,3
刊名	Physica e-low-dimensional systems & nanostructures
	2010-07-01
卷号	42期号:9页码:2420-2423
关键词	High reflective P-gan Aes Optimal conditions
ISSN号	1386-9477
DOI	10.1016/j.physe.2010.05.027
通讯作者	Zhang, bao-ping(bzhang@xmu.edu.cn)
英文摘要	A metallization scheme of ni/ag/ti/au has been developed for obtaining high reflective contacts on p-type gan. in order to find optimal conditions to get a high reflectivity, we studied samples with various ni thicknesses, annealing temperatures and annealing times. by annealing at 500 degrees c for 5 min in an o(2) ambient, a reflectivity as high as 94% was obtained from ni/ag/ti/au (1/120/120/50 nm). the effects of ti layers on the suppression of ag agglomeration were investigated by using auger electron spectroscopy (aes). from aes depth profiles, it is clear that ti acts as a diffusion barrier to prevent au atoms from diffusing into the ag layer, which is important in the formation of high reflectivity. crown copyright (c) 2010 published by elsevier b.v. all rights reserved.
WOS关键词	LIGHT-EMITTING-DIODES ; OHMIC CONTACTS ; LOW-RESISTANCE ; TI/AL/TI/AU
WOS研究方向	Science & Technology - Other Topics ; Physics
WOS类目	Nanoscience & Nanotechnology ; Physics, Condensed Matter
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000280897700040
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2427810
专题	半导体研究所
通讯作者	Zhang, Bao-Ping
作者单位	1.Xiamen Univ, Dept Phys, Lab Micro Nano Optoelect, Xiamen 361005, Fujian, Peoples R China 2.Xiamen Univ, Dept Phys, Semicond Photon Res Ctr, Xiamen 361005, Fujian, Peoples R China 3.Xiamen Univ, Pen Tung Sah Micro Nano Technol Res Ctr, Xiamen 361005, Fujian, Peoples R China 4.Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Jiang, Fang,Cai, Li-E,Zhang, Jiang-Yong,et al. Formation of high reflective ni/ag/ti/au contact on p-gan[J]. Physica e-low-dimensional systems & nanostructures,2010,42(9):2420-2423.
APA	Jiang, Fang,Cai, Li-E,Zhang, Jiang-Yong,&Zhang, Bao-Ping.(2010).Formation of high reflective ni/ag/ti/au contact on p-gan.Physica e-low-dimensional systems & nanostructures,42(9),2420-2423.
MLA	Jiang, Fang,et al."Formation of high reflective ni/ag/ti/au contact on p-gan".Physica e-low-dimensional systems & nanostructures 42.9(2010):2420-2423.

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