| A comparison of silicon oxide and nitride as host matrices on the photoluminescence from er3+ ions | |
| Ding Wu-Chang; Liu Yan; Zhang Yun; Guo Jian-Chuan; Zuo Yu-Hua; Cheng Bu-Wen; Yu Jin-Zhong; Wang Qi-Ming | |
| 刊名 | Chinese physics b
 |
| 2009-07-01 | |
| 卷号 | 18期号:7页码:3044-3048 |
| 关键词 | Er doping Silicon nitride Photoluminescence |
| ISSN号 | 1674-1056 |
| 通讯作者 | Ding wu-chang(wcd04@semi.ac.cn) |
| 英文摘要 | This paper compares the properties of silicon oxide and nitride as host matrices for er ions. erbium-doped silicon nitride films were deposited by a plasma-enhanced chemical-vapour deposition system. after deposition, the films were implanted with er3+ at different doses. er-doped thermal grown silicon oxide films were prepared at the same time as references. photoluminescence features of er3+ were inspected systematically. it is found that silicon nitride films are suitable for high concentration doping and the thermal quenching effect is not severe. however, a very high annealing temperature up to 1200 degrees c is needed to optically activate er3+ which may be the main obstacle to impede the application of er-doped silicon nitride. |
| WOS关键词 | ERBIUM-DOPED SILICON ; SI NANOCRYSTALS ; EXCITATION ; ELECTROLUMINESCENCE ; LUMINESCENCE ; DEEXCITATION ; ALLOYS |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| 出版者 | IOP PUBLISHING LTD |
| WOS记录号 | WOS:000267821200072 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2427649 |
| 专题 | 半导体研究所 |
| 通讯作者 | Ding Wu-Chang |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Ding Wu-Chang,Liu Yan,Zhang Yun,et al. A comparison of silicon oxide and nitride as host matrices on the photoluminescence from er3+ ions[J]. Chinese physics b,2009,18(7):3044-3048. |
| APA | Ding Wu-Chang.,Liu Yan.,Zhang Yun.,Guo Jian-Chuan.,Zuo Yu-Hua.,...&Wang Qi-Ming.(2009).A comparison of silicon oxide and nitride as host matrices on the photoluminescence from er3+ ions.Chinese physics b,18(7),3044-3048. |
| MLA | Ding Wu-Chang,et al."A comparison of silicon oxide and nitride as host matrices on the photoluminescence from er3+ ions".Chinese physics b 18.7(2009):3044-3048. |
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