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	Effect of silver growth temperature on the contacts between ag and zno thin films
	Li XinKun1; Li QingShan2; Liang DeChun3; Xu YanDong1; Xie XiaoJun1
刊名	Science in china series e-technological sciences
	2009-09-01
卷号	52期号:9页码:2779-2784
关键词	Zno Schottky barrier Interface Msm structure
ISSN号	1006-9321
DOI	10.1007/s11431-009-0155-8
通讯作者	Li xinkun(phylxk@163.com)
英文摘要	Highly c-axis oriented zno thin films were deposited on si substrates by the pulsed laser deposition (pld) method. at different growth temperatures, 200 nm silver films as the contact metal were deposited on the zno thin films. the growth temperatures have great influence on the crystal quality of ag films. current-voltage characteristics were measured at room temperature. the schottky contacts between ag and zno thin films were successfully obtained when silver electrodes were deposited at 150a degrees c and 200a degrees c. ohmic contacts were formed while the growth temperatures were lower than 150a degrees c or higher than 200a degrees c. after analysis, the forming of ag/zno schottky contacts was shown to be dependent on the appearance of the p-type inversion layer at the interface between ag and zno layers.
WOS关键词	SCHOTTKY CONTACTS
WOS研究方向	Engineering ; Materials Science
WOS类目	Engineering, Multidisciplinary ; Materials Science, Multidisciplinary
语种	英语
出版者	SCIENCE PRESS
WOS记录号	WOS:000268983800039
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2427605
专题	半导体研究所
通讯作者	Li XinKun
作者单位	1.Qufu Normal Univ, Coll Phys & Engn, Qufu 273165, Peoples R China 2.Ludong Univ, Yantai 264025, Peoples R China 3.Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Li XinKun,Li QingShan,Liang DeChun,et al. Effect of silver growth temperature on the contacts between ag and zno thin films[J]. Science in china series e-technological sciences,2009,52(9):2779-2784.
APA	Li XinKun,Li QingShan,Liang DeChun,Xu YanDong,&Xie XiaoJun.(2009).Effect of silver growth temperature on the contacts between ag and zno thin films.Science in china series e-technological sciences,52(9),2779-2784.
MLA	Li XinKun,et al."Effect of silver growth temperature on the contacts between ag and zno thin films".Science in china series e-technological sciences 52.9(2009):2779-2784.

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