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Influence of implantation energy on the characteristics of mn-implanted nonpolar a-plane gan films
Sun, Lili; Yan, Fawang; Wang, Junxi; Zhang, Huixiao; Zeng, Yiping; Wang, Guohong; Li, Jinmin
刊名Materials letters
2009-02-15
卷号63期号:3-4页码:451-453
关键词Diluted magnetic semiconductors (dmss) Implantation energy Nonpolar a-plane gan:mn films Room temperature
ISSN号0167-577X
DOI10.1016/j.matlet.2008.11.009
通讯作者Sun, lili(lilisun@semi.ac.cn)
英文摘要Nonpolar gan:mn films have been fabricated by implanting mn-ion into nonpolar a-plane (mo) gan films at room temperature. the influence of implantation energy on the structural, morphological and magnetic characteristics of samples have been investigated by means of stopping and range of ions in matter (srim) simulation software, high-resolution x-ray diffraction (hrxrd), atomic force microscopy (afm), and superconducting quantum interference device (squid). according to the squid analysis, obvious room temperature ferromagnetic properties of samples were detected. moreover, the implantation energy has little impact on the ferromagnetic properties of samples. the xrd and afm analyses show that the structural and morphological characteristics of samples were severely deteriorated with the increase of implantation energy. (c) 2008 elsevier b.v. all rights reserved.
WOS关键词P-TYPE GAN ; ROOM-TEMPERATURE ; SAPPHIRE
WOS研究方向Materials Science ; Physics
WOS类目Materials Science, Multidisciplinary ; Physics, Applied
语种英语
出版者ELSEVIER SCIENCE BV
WOS记录号WOS:000262601000034
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2427509
专题半导体研究所
通讯作者Sun, Lili
作者单位Chinese Acad Sci, Inst Semicond, Semicond Lighting Technol Res & Dev Ctr, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Sun, Lili,Yan, Fawang,Wang, Junxi,et al. Influence of implantation energy on the characteristics of mn-implanted nonpolar a-plane gan films[J]. Materials letters,2009,63(3-4):451-453.
APA Sun, Lili.,Yan, Fawang.,Wang, Junxi.,Zhang, Huixiao.,Zeng, Yiping.,...&Li, Jinmin.(2009).Influence of implantation energy on the characteristics of mn-implanted nonpolar a-plane gan films.Materials letters,63(3-4),451-453.
MLA Sun, Lili,et al."Influence of implantation energy on the characteristics of mn-implanted nonpolar a-plane gan films".Materials letters 63.3-4(2009):451-453.
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