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	Design and fabrication of polarization-independent micro-ring resonators
	Geng Min-Ming; Jia Lian-Xi; Zhang Lei; Liu Yu-Liang; Yang Lin; Li Fang
刊名	Chinese physics letters
	2008-04-01
卷号	25期号:4页码:1333-1335
ISSN号	0256-307X
通讯作者	Geng min-ming(eric@semi.ac.cn)
英文摘要	Origin of polarization sensitivity of photonic wire waveguides (pwws) is analysed and the effective refractive indices of two different polarization states are calculated by the three-dimensional full-vector beam propagation method. we find that pwws are polarization insensitive if the distribution of its refractive index is uniform and the cross section is square. an mrr based on such a polarization-insensitive pww is fabricated on an 8-inch silicon-on-insulator wafer using 248-nm deep ultraviolet lithography and reactive ion etching. the quasi-te mode is resonant at 1542.25 nm and 1558.90 nm, and the quasi-tm mode is resonant at 1542.12 nm and 1558.94 nm. the corresponding polarization shift is 0.13 nm at the shorter wavelength and 0.04 nm at the longer wavelength. thus the fabricated device is polarization independent. the extinction ratio is larger than 10 db. the 3 db bandwidth is about 2.5 nm and the qvalue is about 620 at 1558.90 nm.
WOS关键词	VARIABLE OPTICAL ATTENUATOR
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000255153000046
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2427359
专题	半导体研究所
通讯作者	Geng Min-Ming
作者单位	Chinese Acad Sci, Inst Semicond, Lab Optoelect Syst, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Geng Min-Ming,Jia Lian-Xi,Zhang Lei,et al. Design and fabrication of polarization-independent micro-ring resonators[J]. Chinese physics letters,2008,25(4):1333-1335.
APA	Geng Min-Ming,Jia Lian-Xi,Zhang Lei,Liu Yu-Liang,Yang Lin,&Li Fang.(2008).Design and fabrication of polarization-independent micro-ring resonators.Chinese physics letters,25(4),1333-1335.
MLA	Geng Min-Ming,et al."Design and fabrication of polarization-independent micro-ring resonators".Chinese physics letters 25.4(2008):1333-1335.

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