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	Recent advances in synthesis and properties of cubic boron nitride films
	Zhang Xing-Wang; You Jing-Bi; Chen Nuo-Fu
刊名	Journal of inorganic materials
	2007-05-01
卷号	22期号:3页码:385-390
关键词	Cubic boron nitride (c-bn) films Heteroepitaxy Stress Adhesion
ISSN号	1000-324X
通讯作者	Zhang xing-wang(xwzhang@semi.ac.cn)
英文摘要	Cubic boron nitride (c-bn) attracts widespread interest as a promising material for many potential applications because of its unique physical and chemical properties. since the 1980's the research in c-bn thin films has been carried out, which reached its summit in the mid of 1990's, then turned into a downward period. in the past few years, however, important progress was achieved in synthesis and properties of cubic boron nitride films, such as obtaining > 1 mu m thick c-bn films, epitaxial growth of single crystalline c-bn films, and advances in mechanics properties and microstructures of the interlayer of c-bn films. the present article reviews the current status of the synthesis and properties of c-bn thin films.
WOS关键词	CHEMICAL-VAPOR-DEPOSITION ; BEAM-ASSISTED DEPOSITION ; BN THIN-FILMS ; C-BN ; CBN FILMS ; HIGH-PRESSURE ; GROWTH ; DIAMOND ; SILICON ; QUALITY
WOS研究方向	Materials Science
WOS类目	Materials Science, Ceramics
语种	英语
出版者	SCIENCE CHINA PRESS
WOS记录号	WOS:000246716400001
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426990
专题	半导体研究所
通讯作者	Zhang Xing-Wang
作者单位	Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Zhang Xing-Wang,You Jing-Bi,Chen Nuo-Fu. Recent advances in synthesis and properties of cubic boron nitride films[J]. Journal of inorganic materials,2007,22(3):385-390.
APA	Zhang Xing-Wang,You Jing-Bi,&Chen Nuo-Fu.(2007).Recent advances in synthesis and properties of cubic boron nitride films.Journal of inorganic materials,22(3),385-390.
MLA	Zhang Xing-Wang,et al."Recent advances in synthesis and properties of cubic boron nitride films".Journal of inorganic materials 22.3(2007):385-390.

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