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Growth of gasb layers on gaas (001) substrate by molecular beam epitaxy
Hao, Ruiting; Xu, Yingqiang; Zhou, Zhiqiang; Ren, Zhengwei; Ni, Haiqiao; He, Zhenhong; Niu, Zhichuan
刊名Journal of physics d-applied physics
2007-02-21
卷号40期号:4页码:1080-1084
ISSN号0022-3727
DOI10.1088/0022-3727/40/4/025
通讯作者Niu, zhichuan(zcniu@red.semi.ac.cn)
英文摘要Gasb 1 mu m-thick layers were grown by molecular beam epitaxy on gaas (001). the effects of the growth conditions on the crystalline quality, surface morphology, electrical properties and optical properties were studied by double crystalline x-ray diffraction, atomic force microscopy, hall measurement and photoluminescence spectroscopy, respectively. it was found that the surface roughness and hole mobility are highly dependent on the antimony-to-gallium flux ratios and growth temperatures. the crystalline quality, electrical properties and optical properties of gasb layers were also studied as functions of growth rate, and it was found that a suitably low growth rate is beneficial for the crystalline quality and electrical and optical properties. better crystal quality gasb layers with a minimum root mean square surface roughness of 0.1 nm and good optical properties were obtained at a growth rate of 0.25 mu m h(-1).
WOS关键词INFRARED PHOTODIODES ; DETECTORS ; SUPERLATTICES ; GAAS(001) ; LONG ; HALL
WOS研究方向Physics
WOS类目Physics, Applied
语种英语
出版者IOP PUBLISHING LTD
WOS记录号WOS:000245274300026
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2426943
专题半导体研究所
通讯作者Niu, Zhichuan
作者单位Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Hao, Ruiting,Xu, Yingqiang,Zhou, Zhiqiang,et al. Growth of gasb layers on gaas (001) substrate by molecular beam epitaxy[J]. Journal of physics d-applied physics,2007,40(4):1080-1084.
APA Hao, Ruiting.,Xu, Yingqiang.,Zhou, Zhiqiang.,Ren, Zhengwei.,Ni, Haiqiao.,...&Niu, Zhichuan.(2007).Growth of gasb layers on gaas (001) substrate by molecular beam epitaxy.Journal of physics d-applied physics,40(4),1080-1084.
MLA Hao, Ruiting,et al."Growth of gasb layers on gaas (001) substrate by molecular beam epitaxy".Journal of physics d-applied physics 40.4(2007):1080-1084.
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