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	The correlation between preferred orientation and performance of ito thin films
	Chen, Yao; Zhou, Yuqin; Zhang, Qunfang; Zhu, Meifang; Liu, Fengzhen
刊名	Journal of materials science-materials in electronics
	2007-10-01
卷号	18页码:S411-s414
ISSN号	0957-4522
DOI	10.1007/s10854-007-9231-7
通讯作者	Zhou, yuqin(yqzhou@gucas.ac.cn)
英文摘要	The tin-doped indium oxide (ito) thin films were prepared by reactive thermal evaporation on the glass substrates. the effects of substrate temperatures (t-s) on the grain preferred orientation, the electrical and optical properties of ito films were studied. x-ray diffraction (xrd) patterns indicated that the preferred orientation of film changes from (222) to (400) as t, > 200 degrees c. it can be explained by that the low-index crystallographic planes are easier to be formed when the adatoms have high surface mobility. the hall measurements indicated that both the concentration and mobility of carrier increase with increasing t,,,. the grain orientation of film does not influence the transmissivity and the carrier concentration, but enhances the carrier mobility. the transmissivity of ito films is over 90% in the visible wavelength region (except that of the film deposited at 125 degrees c). a minimum resistivity of 5 x 10-4 omega cm is achieved for the (400) preferred orientation film. thus, the highest figure of merit of 3.5 x 10(-2) square/omega is obtained for the film with (400) preferred orientation. the correlation between the preferred orientation and electrical and optical properties are discussed.
WOS关键词	ELECTRICAL-PROPERTIES ; OPTICAL-PROPERTIES ; MAGNETRON ; SUBSTRATE ; DEPENDENCE ; GROWTH
WOS研究方向	Engineering ; Materials Science ; Physics
WOS类目	Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
语种	英语
出版者	SPRINGER
WOS记录号	WOS:000248803300083
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426882
专题	半导体研究所
通讯作者	Zhou, Yuqin
作者单位	1.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Grad Sch, Coll Phys Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Chen, Yao,Zhou, Yuqin,Zhang, Qunfang,et al. The correlation between preferred orientation and performance of ito thin films[J]. Journal of materials science-materials in electronics,2007,18:S411-s414.
APA	Chen, Yao,Zhou, Yuqin,Zhang, Qunfang,Zhu, Meifang,&Liu, Fengzhen.(2007).The correlation between preferred orientation and performance of ito thin films.Journal of materials science-materials in electronics,18,S411-s414.
MLA	Chen, Yao,et al."The correlation between preferred orientation and performance of ito thin films".Journal of materials science-materials in electronics 18(2007):S411-s414.

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