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	Growth of a novel periodic structure of sic/aln multilayers by low pressure chemical vapour deposition
	Zhao Yong-Mei; Sun Guo-Sheng; Li Jia-Ye; Liu Xing-Fang; Wang Lei; Zhao Wan-Shun; Li Jin-Min
刊名	Chinese physics letters
	2007-06-01
卷号	24期号:6页码:1753-1755
ISSN号	0256-307X
通讯作者	Zhao yong-mei(ymzhao@semi.ac.cn)
英文摘要	A novel 10-period sic/aln multilayered structure with a sic cap layer is prepared by low pressure chemical vapour deposition (lpcvd). the structure with total film thickness of about 1.45 mu m is deposited on a si (111) substrate and shows good surface morphology with a smaller rms surface roughness of 5.3 nm. according to the secondary ion mass spectroscopy results, good interface of the 10 period sic/aln structure and periodic changes of depth profiles of c, si, al, n components are obtained by controlling the growth procedure. the structure exhibits the peak reflectivity close to 30% near the wavelength of 322 nm. to the best of our knowledge, this is the first report of growth of the sic/aln periodic structure using the home-made lpcvd system.
WOS关键词	SUBSTRATE ; FILMS
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000247045400088
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426880
专题	半导体研究所
通讯作者	Zhao Yong-Mei
作者单位	Chinese Acad Sci, Inst Semicond, Novel Semicond Mat Lab, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Zhao Yong-Mei,Sun Guo-Sheng,Li Jia-Ye,et al. Growth of a novel periodic structure of sic/aln multilayers by low pressure chemical vapour deposition[J]. Chinese physics letters,2007,24(6):1753-1755.
APA	Zhao Yong-Mei.,Sun Guo-Sheng.,Li Jia-Ye.,Liu Xing-Fang.,Wang Lei.,...&Li Jin-Min.(2007).Growth of a novel periodic structure of sic/aln multilayers by low pressure chemical vapour deposition.Chinese physics letters,24(6),1753-1755.
MLA	Zhao Yong-Mei,et al."Growth of a novel periodic structure of sic/aln multilayers by low pressure chemical vapour deposition".Chinese physics letters 24.6(2007):1753-1755.

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