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Interfaces in heterostructures of alingan/gan/al2o3
Zhou, SQ; Wu, MF; Yao, SD; Liu, JP; Yang, H
刊名Superlattices and microstructures
2006-05-01
卷号39期号:5页码:429-435
关键词Nitride semiconductors Interface Rutherford backscattering/channeling Transmission electron microscopy X-ray diffraction
ISSN号0749-6036
DOI10.1016/j.spmi.2005.10.003
通讯作者Zhou, sq(s.zhou@rossendorf.de)
英文摘要Rutherford backscattering/channeling (rbs/c) and x-ray diffraction (xrd) are used to comprehensively characterize a heterostructure of alingan/gan/al2o3(0001). the alingan quaternary layer was revealed to process a high crystalline quality with a minimum yield of 1.4% from rbs/c measurements. the channeling spectrum of (1 (2) under bar 13) exhibits higher dechanneling than that of (0001) at the interface of alingan/gan. xrd measurements prove a coherent growth of alingan on the gan template layer. combining rbs/c and xrd measurements, we found that the interface of gan/al2o3 is a nucleation layer, composed of a large amount of disorders and cubic gan slabs, while the interface of alingan/gan is free of extra disordering (i.e. compare with the gan layer). the conclusion is further evidenced by transmission electron microscopy (tem). (c) 2005 elsevier ltd. all rights reserved.
WOS关键词SUPER-LATTICES ; STRAIN ; GAN
WOS研究方向Physics
WOS类目Physics, Condensed Matter
语种英语
出版者ACADEMIC PRESS LTD ELSEVIER SCIENCE LTD
WOS记录号WOS:000237914100005
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2426741
专题半导体研究所
通讯作者Zhou, SQ
作者单位1.Peking Univ, Sch Phys, Beijing 100871, Peoples R China
2.Chinese Acad Sci, Inst Semicond, Natl Res Ctr Optoelect Technol, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Zhou, SQ,Wu, MF,Yao, SD,et al. Interfaces in heterostructures of alingan/gan/al2o3[J]. Superlattices and microstructures,2006,39(5):429-435.
APA Zhou, SQ,Wu, MF,Yao, SD,Liu, JP,&Yang, H.(2006).Interfaces in heterostructures of alingan/gan/al2o3.Superlattices and microstructures,39(5),429-435.
MLA Zhou, SQ,et al."Interfaces in heterostructures of alingan/gan/al2o3".Superlattices and microstructures 39.5(2006):429-435.
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