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	High quality microcrystalline si films by hydrogen dilution profile
	Gu, Jinhua; Zhu, Meifang; Wang, Liujiu; Liu, Fengzhen; Zhou, Bingqing; Ding, Kun; Li, Guohua
刊名	Thin solid films
	2006-10-25
卷号	515期号:2页码:452-455
关键词	Microcrystalline si thin film Hydrogen dilution profiling Incubation layer Uniformity
ISSN号	0040-6090
DOI	10.1016/j.tsf.2005.12.255
通讯作者	Zhu, meifang(mfzhu@gucas.ac.cn)
英文摘要	Novel hydrogen dilution profiling (hdp) technique was developed to improve the uniformity in the growth direction of mu c-si:h thin films prepared by hot wire chemical vapor deposition (hwcvd). it was found that the high h dilution ratio reduces the incubation layer from 30 nm to less than 10 nm. a proper design of hydrogen dilution profiling improves the uniformity of crystalline content, x-c, in the growth direction and restrains the formation of micro-voids as well. as a result the compactness of mu c-si:h films with a high crystalline content is enhanced and the stability of mu c-si:h thin film against the oxygen diffusion is much improved. meanwhile the hdp mu c-si:h films exhibit the low defect states. the high nucleation density from high hydrogen dilution at early stage is a critical parameter to improve the quality of mu c-si:h films. (c) 2006 published by elsevier b.v.
WOS关键词	CHEMICAL-VAPOR-DEPOSITION ; THIN ; ALLOYS ; CVD
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
语种	英语
出版者	ELSEVIER SCIENCE SA
WOS记录号	WOS:000241220600016
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426608
专题	半导体研究所
通讯作者	Zhu, Meifang
作者单位	1.Chinese Acad Sci, Grad Sch, Coll Phys Sci, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Gu, Jinhua,Zhu, Meifang,Wang, Liujiu,et al. High quality microcrystalline si films by hydrogen dilution profile[J]. Thin solid films,2006,515(2):452-455.
APA	Gu, Jinhua.,Zhu, Meifang.,Wang, Liujiu.,Liu, Fengzhen.,Zhou, Bingqing.,...&Li, Guohua.(2006).High quality microcrystalline si films by hydrogen dilution profile.Thin solid films,515(2),452-455.
MLA	Gu, Jinhua,et al."High quality microcrystalline si films by hydrogen dilution profile".Thin solid films 515.2(2006):452-455.

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