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	Depth dependent elastic strain in zno epilayer: combined rutherford backscattering/channeling and x-ray diffraction
	Feng, ZX; Yao, SD; Hou, L; Jin, RQ
刊名	Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms
	2005-03-01
卷号	229期号:2页码:246-252
关键词	Rutherford backscattering/channeling Elastic strain Tetragonal distortion Lattice mismatich
ISSN号	0168-583X
DOI	10.1016/j.nimb.2004.11.020
通讯作者	Feng, zx(fengz@physics.mcgill.ca)
英文摘要	A zno layer was grown by metalorganic chemical vapor deposition (mocvd) on a sapphire (0 0 0 1) substrate. the perpendicular and parallel elastic strain of the zno epilayer, e(perpendicular to) = 0.19%, e(parallel to) = -0.29%, respectively, were derived by using the combination of rutherford backscattering (rbs)/channeling and x-ray diffraction (xrd). the ratio vertical bar e(parallel to)/ e(perpendicular to)vertical bar = 1.5 indicates that zno layer is much stiffer in the a-axis direction than in the c-axis direction. by using rbs/c, the depth dependent elastic strain was deduced. the strain is higher at the depth close to the interface and decreases towards the surface. the negative tetragonal distortion was explained by considering the lattice mismatch and thermal mismatch in zno thin film. (c) 2004 elsevier b.v. all rights reserved.
WOS关键词	SAPPHIRE ; HETEROEPITAXY ; DEVICES ; GROWTH ; FILMS
WOS研究方向	Instruments & Instrumentation ; Nuclear Science & Technology ; Physics
WOS类目	Instruments & Instrumentation ; Nuclear Science & Technology ; Physics, Atomic, Molecular & Chemical ; Physics, Nuclear
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000227669600008
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426513
专题	半导体研究所
通讯作者	Feng, ZX
作者单位	1.McGill Univ, Dept Phys, Montreal, PQ H3A 2T8, Canada 2.Peking Univ, Sch Phys, Dept Tech Phys, Beijing 100871, Peoples R China 3.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Feng, ZX,Yao, SD,Hou, L,et al. Depth dependent elastic strain in zno epilayer: combined rutherford backscattering/channeling and x-ray diffraction[J]. Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms,2005,229(2):246-252.
APA	Feng, ZX,Yao, SD,Hou, L,&Jin, RQ.(2005).Depth dependent elastic strain in zno epilayer: combined rutherford backscattering/channeling and x-ray diffraction.Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms,229(2),246-252.
MLA	Feng, ZX,et al."Depth dependent elastic strain in zno epilayer: combined rutherford backscattering/channeling and x-ray diffraction".Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms 229.2(2005):246-252.

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