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	High speed 2x2 optical switch in silicon-on-insulator based on plasma dispersion effect
	Sun, F; Yu, JZ; Chen, SW
刊名	Chinese physics letters
	2005-12-01
卷号	22期号:12页码:3097-3099
ISSN号	0256-307X
通讯作者	Sun, f(sun@red.semi.ac.cn)
英文摘要	Based on free carrier plasma dispersion effect, a 2 x 2 optical switch is fabricated in a silicon-on-insulator substrate by inductively coupled-plasma technology and ion implantation. the device has a mach-zehnder interferometer structure, in which two directional couplers serve as the power splitter and combiner. the switch presents an insertion loss of 3.04 db and a response time of 496 ns.
WOS关键词	WAVE-GUIDE SWITCH ; FAST-RESPONSE ; THERMOOPTICAL SWITCH ; MATRIX ; FABRICATION
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
语种	英语
出版者	CHINESE PHYSICAL SOC
WOS记录号	WOS:000233799600032
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426452
专题	半导体研究所
通讯作者	Sun, F
作者单位	Chinese Acad Sci, Inst Semicond, Natl Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Sun, F,Yu, JZ,Chen, SW. High speed 2x2 optical switch in silicon-on-insulator based on plasma dispersion effect[J]. Chinese physics letters,2005,22(12):3097-3099.
APA	Sun, F,Yu, JZ,&Chen, SW.(2005).High speed 2x2 optical switch in silicon-on-insulator based on plasma dispersion effect.Chinese physics letters,22(12),3097-3099.
MLA	Sun, F,et al."High speed 2x2 optical switch in silicon-on-insulator based on plasma dispersion effect".Chinese physics letters 22.12(2005):3097-3099.

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