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	Microstructure and photoluminescence performances of sic nanocrystals embedded in sio2 matrix by magnetron co-sputtering
	Shi, LW; Li, YG; Wang, Q; Xue, CS; Zhuang, HZ
刊名	Rare metal materials and engineering
	2005-07-01
卷号	34期号:7页码:1073-1076
关键词	Magnetron co-sputtering Sic nanocrystals Microstructure Photoluminescence
ISSN号	1002-185X
通讯作者	Shi, lw(slwei521@tom.com)
英文摘要	Silicon carbide (sic) nanocrystals embedded in silicon oxide (sio2) matrix on si(111) substrates were prepared by radio frequency (rf) magnetron co-sputtering using a sio2/sic composite target and adopting subsequent high temperature annealing. the microstructure and luminescent performances of the films were determined by x-ray diffraction (xrd), fourier transform infrared transmission spectroscopy (ftir), scanning electron microscopy (sem) and photoluminescence (pl) measurements. the results show that the crystallization has taken place in the composite films after high temperature annealing and a part of amorphous sic has been changed into beta-sic nanocrystals, which are embedded in sio2 matrix. strong ultraviolet band (365 nm) and blue bands (458 nm and 490 nm) pl from the films, which is excited by 280 nm light, have been observed at room temperature. pl intensity increases with increasing of annealing temperature. pl is attributed to the luminescent centers formed by the si-o related defects in the film.
WOS关键词	MECHANISM ; SILICON ; FILMS ; BLUE
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
语种	英语
出版者	NORTHWEST INST NONFERROUS METAL RESEARCH
WOS记录号	WOS:000231868200018
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426346
专题	半导体研究所
通讯作者	Shi, LW
作者单位	Shandong Normal Univ, Coll Phys & Elect, Inst Semicond, Jinan 250014, Peoples R China
推荐引用方式 GB/T 7714	Shi, LW,Li, YG,Wang, Q,et al. Microstructure and photoluminescence performances of sic nanocrystals embedded in sio2 matrix by magnetron co-sputtering[J]. Rare metal materials and engineering,2005,34(7):1073-1076.
APA	Shi, LW,Li, YG,Wang, Q,Xue, CS,&Zhuang, HZ.(2005).Microstructure and photoluminescence performances of sic nanocrystals embedded in sio2 matrix by magnetron co-sputtering.Rare metal materials and engineering,34(7),1073-1076.
MLA	Shi, LW,et al."Microstructure and photoluminescence performances of sic nanocrystals embedded in sio2 matrix by magnetron co-sputtering".Rare metal materials and engineering 34.7(2005):1073-1076.

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