A 10-ghz bandwidth electroabsorption modulated laser by ultra-low-pressure selective area growth | |
Zhao, Q; Pan, JQ; Zhou, F; Wang, BJ; Wang, LF; Wang, W | |
刊名 | Chinese physics letters |
2005-08-01 | |
卷号 | 22期号:8页码:2016-2019 |
ISSN号 | 0256-307X |
通讯作者 | Zhao, q(qzhao@red.semi.ac.cn) |
英文摘要 | A novel integration technique has been developed using band-gap energy control of ingaasp/ingaasp multi-quantum-well (mqw) structures during simultaneous ultra-low-pressure (22 mbar) selective-area-growth (sag) process in metal-organic chemical vapour deposition. a fundamental study of the controllability of band gap energy by the sag method is performed. a large band-gap photoluminescence wavelength shift of 83nm is obtained with a small mask width variation (0-30 mu m). the method is then applied to fabricate an mqw distributed-feedback laser monolithically integrated with an electroabsorption modulator. the experimental results exhibit superior device characteristics with low threshold of 19 ma, over 24 db extinction ratio when coupled into a single mode fibre. more than 10ghz modulation bandwidth is also achieved, which demonstrates that the ultra-low-pressure sag technique is a promising approach for high-speed transmission photonic integrated circuits. |
WOS关键词 | MOVPE ; EPITAXY ; DEVICES |
WOS研究方向 | Physics |
WOS类目 | Physics, Multidisciplinary |
语种 | 英语 |
出版者 | CHINESE PHYSICAL SOC |
WOS记录号 | WOS:000231049100054 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2426285 |
专题 | 半导体研究所 |
通讯作者 | Zhao, Q |
作者单位 | Chinese Acad Sci, Inst Semicond, Natl Res Ctr Optoelect Technol, Beijing 100083, Peoples R China |
推荐引用方式 GB/T 7714 | Zhao, Q,Pan, JQ,Zhou, F,et al. A 10-ghz bandwidth electroabsorption modulated laser by ultra-low-pressure selective area growth[J]. Chinese physics letters,2005,22(8):2016-2019. |
APA | Zhao, Q,Pan, JQ,Zhou, F,Wang, BJ,Wang, LF,&Wang, W.(2005).A 10-ghz bandwidth electroabsorption modulated laser by ultra-low-pressure selective area growth.Chinese physics letters,22(8),2016-2019. |
MLA | Zhao, Q,et al."A 10-ghz bandwidth electroabsorption modulated laser by ultra-low-pressure selective area growth".Chinese physics letters 22.8(2005):2016-2019. |
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