CORC  > 半导体研究所
A 10-ghz bandwidth electroabsorption modulated laser by ultra-low-pressure selective area growth
Zhao, Q; Pan, JQ; Zhou, F; Wang, BJ; Wang, LF; Wang, W
刊名Chinese physics letters
2005-08-01
卷号22期号:8页码:2016-2019
ISSN号0256-307X
通讯作者Zhao, q(qzhao@red.semi.ac.cn)
英文摘要A novel integration technique has been developed using band-gap energy control of ingaasp/ingaasp multi-quantum-well (mqw) structures during simultaneous ultra-low-pressure (22 mbar) selective-area-growth (sag) process in metal-organic chemical vapour deposition. a fundamental study of the controllability of band gap energy by the sag method is performed. a large band-gap photoluminescence wavelength shift of 83nm is obtained with a small mask width variation (0-30 mu m). the method is then applied to fabricate an mqw distributed-feedback laser monolithically integrated with an electroabsorption modulator. the experimental results exhibit superior device characteristics with low threshold of 19 ma, over 24 db extinction ratio when coupled into a single mode fibre. more than 10ghz modulation bandwidth is also achieved, which demonstrates that the ultra-low-pressure sag technique is a promising approach for high-speed transmission photonic integrated circuits.
WOS关键词MOVPE ; EPITAXY ; DEVICES
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
语种英语
出版者CHINESE PHYSICAL SOC
WOS记录号WOS:000231049100054
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2426285
专题半导体研究所
通讯作者Zhao, Q
作者单位Chinese Acad Sci, Inst Semicond, Natl Res Ctr Optoelect Technol, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Zhao, Q,Pan, JQ,Zhou, F,et al. A 10-ghz bandwidth electroabsorption modulated laser by ultra-low-pressure selective area growth[J]. Chinese physics letters,2005,22(8):2016-2019.
APA Zhao, Q,Pan, JQ,Zhou, F,Wang, BJ,Wang, LF,&Wang, W.(2005).A 10-ghz bandwidth electroabsorption modulated laser by ultra-low-pressure selective area growth.Chinese physics letters,22(8),2016-2019.
MLA Zhao, Q,et al."A 10-ghz bandwidth electroabsorption modulated laser by ultra-low-pressure selective area growth".Chinese physics letters 22.8(2005):2016-2019.
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