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	Influence of nitrogen annealing on electrical properties of lead zirconate titanate thin film deposited on titanium metal foil
	Zhang, GQ; Zou, Q; Sun, P; Mei, X; Ruda, HE
刊名	Materials letters
	2004-02-01
卷号	58期号:5页码:706-710
关键词	Ferroelectrics Electrical properties Heat treatment Nitrogen annealing Dielectric constant Leakage current
ISSN号	0167-577X
DOI	10.1016/j.matlet.2003.06.009
通讯作者	Zou, q()
英文摘要	We report on improved electrical properties of lead zirconate titanate (pzt) film deposited on titanium metal foil using nitrogen annealing. after nitrogen annealing of the pzt capacitors, symmetric capacitance-voltage (c-v) characteristics, higher dielectric constant and breakdown field, less change of dielectric constant with frequency, lower dielectric loss and leakage current are obtained. (c) 2003 elsevier b.v. all rights reserved.
WOS关键词	DIELECTRIC-PROPERTIES ; MEMORY DEVICE ; CAPACITORS ; PZT ; DEGRADATION ; INTERFACE ; ELECTRODE ; STORAGE
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Physics, Applied
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000188216300031
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426234
专题	半导体研究所
通讯作者	Zou, Q
作者单位	1.Univ Toronto, Ctr Adv Nanotechnol, Toronto, ON M5S 3E4, Canada 2.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
推荐引用方式 GB/T 7714	Zhang, GQ,Zou, Q,Sun, P,et al. Influence of nitrogen annealing on electrical properties of lead zirconate titanate thin film deposited on titanium metal foil[J]. Materials letters,2004,58(5):706-710.
APA	Zhang, GQ,Zou, Q,Sun, P,Mei, X,&Ruda, HE.(2004).Influence of nitrogen annealing on electrical properties of lead zirconate titanate thin film deposited on titanium metal foil.Materials letters,58(5),706-710.
MLA	Zhang, GQ,et al."Influence of nitrogen annealing on electrical properties of lead zirconate titanate thin film deposited on titanium metal foil".Materials letters 58.5(2004):706-710.

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