Micro-machined gas sensor array based on metal film micro-heater | |
Mo, YW[1]; Okawa, Y[2]; Tajima, M[3]; Nakai, T[4]; Yoshiike, N[5]; Natukawa, K[6] | |
刊名 | SENSORS AND ACTUATORS B-CHEMICAL
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2001 | |
卷号 | 79页码:175-181 |
关键词 | gas detectors sensors arrays micro-electromechanical devices |
ISSN号 | 0925-4005 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2420339 |
专题 | 上海大学 |
作者单位 | 1.Shanghai University, Shanghai 201800, China 2.Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi City, Osaka 594-1157, Japan 3.Kubota Co. Ltd., 1-1, Hama 1-chome, Amagasaki City, Hyougo 661-8567, Japan 4.Hochiki Co. Ltd., 246, Turuma, Machida City, Tokyo 194-8577, Japan 5.Matsushita Electric Industrial Co. Ltd., 3-3-1, Yakumonakamachi, Moriguchi City, Osaka 570-0005, Japan |
推荐引用方式 GB/T 7714 | Mo, YW[1],Okawa, Y[2],Tajima, M[3],et al. Micro-machined gas sensor array based on metal film micro-heater[J]. SENSORS AND ACTUATORS B-CHEMICAL,2001,79:175-181. |
APA | Mo, YW[1],Okawa, Y[2],Tajima, M[3],Nakai, T[4],Yoshiike, N[5],&Natukawa, K[6].(2001).Micro-machined gas sensor array based on metal film micro-heater.SENSORS AND ACTUATORS B-CHEMICAL,79,175-181. |
MLA | Mo, YW[1],et al."Micro-machined gas sensor array based on metal film micro-heater".SENSORS AND ACTUATORS B-CHEMICAL 79(2001):175-181. |
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