Experimental study of sweep control in e-beam evaporated optical coatings | |
Wang, Ning1,2; Shao, Jianda1; Yi, Kui1; Wei, Chaoyang1 | |
刊名 | Chinese optics letters
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2010-06-10 | |
卷号 | 8期号:6页码:621-623 |
ISSN号 | 1671-7694 |
DOI | 10.3788/col20100806.0621 |
通讯作者 | Wang, ning(shumangy@126.com) |
英文摘要 | High performance optical coating requires excellent uniformity of thin-film. keeping the surface of evaporation material flat is propitious for the stability of vapor plume, and can improve the uniformity of thin-film. based on the principle of electron beam spot sweep, a pattern controller in domestic coater is designed. for the purpose of even evaporation during auto-sweep, the influence of the depth of material surface in the crucible on the evaporation characteristic is considered. pre-melting and evaporation experiments are performed on melting material (ti(3)o(5)), subliming material (sio(2)), and semi-melting, semi-subliming material (hfo(2)). the sweeping experimental results show that using the designed sweep controller can make good performance on evaporation and pre-melting for the above materials. |
WOS研究方向 | Optics |
WOS类目 | Optics |
语种 | 英语 |
出版者 | CHINESE OPTICS LETTERS MANUSCRIPT OFFICE |
WOS记录号 | WOS:000278721000025 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2410845 |
专题 | 中国科学院大学 |
通讯作者 | Wang, Ning |
作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
推荐引用方式 GB/T 7714 | Wang, Ning,Shao, Jianda,Yi, Kui,et al. Experimental study of sweep control in e-beam evaporated optical coatings[J]. Chinese optics letters,2010,8(6):621-623. |
APA | Wang, Ning,Shao, Jianda,Yi, Kui,&Wei, Chaoyang.(2010).Experimental study of sweep control in e-beam evaporated optical coatings.Chinese optics letters,8(6),621-623. |
MLA | Wang, Ning,et al."Experimental study of sweep control in e-beam evaporated optical coatings".Chinese optics letters 8.6(2010):621-623. |
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