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	Experimental study of sweep control in e-beam evaporated optical coatings
	Wang, Ning1,2; Shao, Jianda1; Yi, Kui1; Wei, Chaoyang1
刊名	Chinese optics letters
	2010-06-10
卷号	8期号:6页码:621-623
ISSN号	1671-7694
DOI	10.3788/col20100806.0621
通讯作者	Wang, ning(shumangy@126.com)
英文摘要	High performance optical coating requires excellent uniformity of thin-film. keeping the surface of evaporation material flat is propitious for the stability of vapor plume, and can improve the uniformity of thin-film. based on the principle of electron beam spot sweep, a pattern controller in domestic coater is designed. for the purpose of even evaporation during auto-sweep, the influence of the depth of material surface in the crucible on the evaporation characteristic is considered. pre-melting and evaporation experiments are performed on melting material (ti(3)o(5)), subliming material (sio(2)), and semi-melting, semi-subliming material (hfo(2)). the sweeping experimental results show that using the designed sweep controller can make good performance on evaporation and pre-melting for the above materials.
WOS研究方向	Optics
WOS类目	Optics
语种	英语
出版者	CHINESE OPTICS LETTERS MANUSCRIPT OFFICE
WOS记录号	WOS:000278721000025
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2410845
专题	中国科学院大学
通讯作者	Wang, Ning
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Wang, Ning,Shao, Jianda,Yi, Kui,et al. Experimental study of sweep control in e-beam evaporated optical coatings[J]. Chinese optics letters,2010,8(6):621-623.
APA	Wang, Ning,Shao, Jianda,Yi, Kui,&Wei, Chaoyang.(2010).Experimental study of sweep control in e-beam evaporated optical coatings.Chinese optics letters,8(6),621-623.
MLA	Wang, Ning,et al."Experimental study of sweep control in e-beam evaporated optical coatings".Chinese optics letters 8.6(2010):621-623.

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