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	Grayscale photomask fabricated by laser direct writing in metallic nano-films
	Guo, Chuan Fei1,2; Cao, Sihai1,2; Jiang, Peng1; Fang, Ying1; Zhang, Jianming1,2; Fan, Yongtao1,3; Wang, Yongsheng1,2; Xu, Wendong1,3; Zhao, Zhensheng4; Liu, Qian1
刊名	Optics express
	2009-10-26
卷号	17期号:22页码:19981-19987
ISSN号	1094-4087
DOI	10.1364/oe.17.019981
通讯作者	Guo, chuan fei()
英文摘要	The grayscale photomask plays a key role in grayscale lithography for creating 3d microstructures like micro-optical elements and mems structures, but how to fabricate grayscale masks in a cost-effective way is still a big challenge. here we present novel low cost grayscale masks created in a two-step method by laser direct writing on sn nano-films, which demonstrate continuous-tone gray levels depended on writing powers. the mechanism of the gray levels is due to the coexistence of the metal and the oxides formed in a laser-induced thermal process. the photomasks reveal good technical properties in fabricating 3d microstructures for practical applications. (c) 2009 optical society of america
WOS关键词	SILICON MEMS STRUCTURES ; GRAY-SCALE LITHOGRAPHY ; THIN-FILMS ; TIN OXIDE ; SNO2 ; OXIDATION ; NANOWIRES ; JUNCTIONS ; PHASE ; GLASS
WOS研究方向	Optics
WOS类目	Optics
语种	英语
出版者	OPTICAL SOC AMER
WOS记录号	WOS:000271629200070
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2398918
专题	中国科学院大学
通讯作者	Guo, Chuan Fei
作者单位	1.Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100080, Peoples R China 3.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 4.Chinese Acad Sci, Tech Inst Phys & Chem, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Guo, Chuan Fei,Cao, Sihai,Jiang, Peng,et al. Grayscale photomask fabricated by laser direct writing in metallic nano-films[J]. Optics express,2009,17(22):19981-19987.
APA	Guo, Chuan Fei.,Cao, Sihai.,Jiang, Peng.,Fang, Ying.,Zhang, Jianming.,...&Liu, Qian.(2009).Grayscale photomask fabricated by laser direct writing in metallic nano-films.Optics express,17(22),19981-19987.
MLA	Guo, Chuan Fei,et al."Grayscale photomask fabricated by laser direct writing in metallic nano-films".Optics express 17.22(2009):19981-19987.

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