Formation of hydrogenated amorphous carbon films containing fullerene-like structures | |
Wang, Peng1,2; Wang, Xia1,2; Zhang, Bin1,2; Liu, Weimin1 | |
刊名 | Journal of non-crystalline solids
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2009-09-15 | |
卷号 | 355期号:34-36页码:1742-1746 |
关键词 | Films and coatings Sputtering Carbon |
ISSN号 | 0022-3093 |
DOI | 10.1016/j.jnoncrysol.2009.06.014 |
通讯作者 | Liu, weimin(wmliu@lzb.ac.cn) |
英文摘要 | Hydrogenated amorphous carbon films containing fullerene-like structures were obtained by magnetron sputtering of a titanium target in methane and argon atmosphere. the microstructure of the film was investigated by transmission electron microscopy and raman spectra. additionally, the three stage model proposed by ferrari and robertson was used to explain the formation process of fullerene-like structures. the results show that titanium target was covered by a hydrocarbon layer, and the new-produced hydrocarbon layer on titanium target rather than the titanium surface was sputtered during deposition. the product of the sputtering can serve as 'seeds' for the formation of fullerene-like structures. these 'seeds' or nuclei are proposed to be open graphene structures, at the effect of ions bombardment, more defects are introduced and the curved structure arises due to incorporation of odd member rings into the graphene sheets, which resulted in the formation of curved planes with small radii of curvature and closed fullerene-like structure. (c) 2009 elsevier b.v. all rights reserved. |
WOS关键词 | DIAMOND-LIKE CARBON ; THIN SOLID FILMS ; MECHANICAL-PROPERTIES ; RAMAN-SPECTROSCOPY ; NITRIDE ; GROWTH ; MICROSTRUCTURE ; NANOPARTICLES ; SUPERHARD |
WOS研究方向 | Materials Science |
WOS类目 | Materials Science, Ceramics ; Materials Science, Multidisciplinary |
语种 | 英语 |
出版者 | ELSEVIER SCIENCE BV |
WOS记录号 | WOS:000269896400014 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2395488 |
专题 | 中国科学院大学 |
通讯作者 | Liu, Weimin |
作者单位 | 1.Chinese Acad Sci, State Key Lab Solid Lubricat, Lanzhou Inst Chem Phys, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
推荐引用方式 GB/T 7714 | Wang, Peng,Wang, Xia,Zhang, Bin,et al. Formation of hydrogenated amorphous carbon films containing fullerene-like structures[J]. Journal of non-crystalline solids,2009,355(34-36):1742-1746. |
APA | Wang, Peng,Wang, Xia,Zhang, Bin,&Liu, Weimin.(2009).Formation of hydrogenated amorphous carbon films containing fullerene-like structures.Journal of non-crystalline solids,355(34-36),1742-1746. |
MLA | Wang, Peng,et al."Formation of hydrogenated amorphous carbon films containing fullerene-like structures".Journal of non-crystalline solids 355.34-36(2009):1742-1746. |
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