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	Formation of hydrogenated amorphous carbon films containing fullerene-like structures
	Wang, Peng1,2; Wang, Xia1,2; Zhang, Bin1,2; Liu, Weimin1
刊名	Journal of non-crystalline solids
	2009-09-15
卷号	355期号:34-36页码:1742-1746
关键词	Films and coatings Sputtering Carbon
ISSN号	0022-3093
DOI	10.1016/j.jnoncrysol.2009.06.014
通讯作者	Liu, weimin(wmliu@lzb.ac.cn)
英文摘要	Hydrogenated amorphous carbon films containing fullerene-like structures were obtained by magnetron sputtering of a titanium target in methane and argon atmosphere. the microstructure of the film was investigated by transmission electron microscopy and raman spectra. additionally, the three stage model proposed by ferrari and robertson was used to explain the formation process of fullerene-like structures. the results show that titanium target was covered by a hydrocarbon layer, and the new-produced hydrocarbon layer on titanium target rather than the titanium surface was sputtered during deposition. the product of the sputtering can serve as 'seeds' for the formation of fullerene-like structures. these 'seeds' or nuclei are proposed to be open graphene structures, at the effect of ions bombardment, more defects are introduced and the curved structure arises due to incorporation of odd member rings into the graphene sheets, which resulted in the formation of curved planes with small radii of curvature and closed fullerene-like structure. (c) 2009 elsevier b.v. all rights reserved.
WOS关键词	DIAMOND-LIKE CARBON ; THIN SOLID FILMS ; MECHANICAL-PROPERTIES ; RAMAN-SPECTROSCOPY ; NITRIDE ; GROWTH ; MICROSTRUCTURE ; NANOPARTICLES ; SUPERHARD
WOS研究方向	Materials Science
WOS类目	Materials Science, Ceramics ; Materials Science, Multidisciplinary
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000269896400014
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2395488
专题	中国科学院大学
通讯作者	Liu, Weimin
作者单位	1.Chinese Acad Sci, State Key Lab Solid Lubricat, Lanzhou Inst Chem Phys, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Wang, Peng,Wang, Xia,Zhang, Bin,et al. Formation of hydrogenated amorphous carbon films containing fullerene-like structures[J]. Journal of non-crystalline solids,2009,355(34-36):1742-1746.
APA	Wang, Peng,Wang, Xia,Zhang, Bin,&Liu, Weimin.(2009).Formation of hydrogenated amorphous carbon films containing fullerene-like structures.Journal of non-crystalline solids,355(34-36),1742-1746.
MLA	Wang, Peng,et al."Formation of hydrogenated amorphous carbon films containing fullerene-like structures".Journal of non-crystalline solids 355.34-36(2009):1742-1746.

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