| Feasibility study of micro electro-thermal actuator for lever nano motion | |
| Xuejin Shen[1]; Yongyu Zhang[2]; Xiaoyang Chen[3] | |
| 2006 | |
| 会议名称 | 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3 |
| 会议日期 | 2006-01-18 |
| 关键词 | MEMS nano motion lever electro-thermal actuator right circular flexure hinge |
| 页码 | 1025-1028 |
| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2391900 |
| 专题 | 上海大学 |
| 作者单位 | 1.Shanghai Univ, Dept Mech Automat, Shanghai 200072, Peoples R China. 2.Shanghai Univ, Dept Mech Automat, POB 17,149 Yanchang Rd, Shanghai 200072, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Xuejin Shen[1],Yongyu Zhang[2],Xiaoyang Chen[3]. Feasibility study of micro electro-thermal actuator for lever nano motion[C]. 见:2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3. 2006-01-18. |
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