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	Performance improvement of ZnO film by room-temperature oxygen plasma pretreatment
	Zhao, Ping[1]; Xia, Yi-Ben[2]; Wang, Lin-Jun[3]; Liu, Jian-Min[4]; Xu, Run[5]; Peng, Hong-Yan[6]; Shi, Wei-Min[7]
刊名	Transactions of Nonferrous Metals Society of China (English Edition)
	2006
卷号	16页码:s310-s312
关键词	ZnO film c-axis orientation nanocrystalline diamond film oxygen plasma SAW device
ISSN号	10036326
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2391592
专题	上海大学
作者单位	[1]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [2]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [3]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [4]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [5]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [6]Physics Department, Mudanjiang Normal College, Mudanjiang 157012, China[7]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China
推荐引用方式 GB/T 7714	Zhao, Ping[1],Xia, Yi-Ben[2],Wang, Lin-Jun[3],et al. Performance improvement of ZnO film by room-temperature oxygen plasma pretreatment[J]. Transactions of Nonferrous Metals Society of China (English Edition),2006,16:s310-s312.
APA	Zhao, Ping[1].,Xia, Yi-Ben[2].,Wang, Lin-Jun[3].,Liu, Jian-Min[4].,Xu, Run[5].,...&Shi, Wei-Min[7].(2006).Performance improvement of ZnO film by room-temperature oxygen plasma pretreatment.Transactions of Nonferrous Metals Society of China (English Edition),16,s310-s312.
MLA	Zhao, Ping[1],et al."Performance improvement of ZnO film by room-temperature oxygen plasma pretreatment".Transactions of Nonferrous Metals Society of China (English Edition) 16(2006):s310-s312.

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