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	Influence of intermittently etching on quality of CVD diamond thin films
	Yang, Kan-Cheng[1]; Xia, Yi-Ben[2]; Wang, Lin-Jun[3]; Liu, Jian-Min[4]; Su, Qing-Feng[5]; Xu, Run[6]; Peng, Hong-Yan[7]; Shi, Wei-Min[8]
刊名	Transactions of Nonferrous Metals Society of China (English Edition)
	2006
卷号	16页码:s321-s323
关键词	hot filament chemical vapor deposition diamond film intermittently etching
ISSN号	10036326
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2391590
专题	上海大学
作者单位	[1]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [2]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [3]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [4]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [5]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [6]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [7]Department of Physics, Mudanjiang Normal College, Mudanjiang 157012, China[8]School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China
推荐引用方式 GB/T 7714	Yang, Kan-Cheng[1],Xia, Yi-Ben[2],Wang, Lin-Jun[3],et al. Influence of intermittently etching on quality of CVD diamond thin films[J]. Transactions of Nonferrous Metals Society of China (English Edition),2006,16:s321-s323.
APA	Yang, Kan-Cheng[1].,Xia, Yi-Ben[2].,Wang, Lin-Jun[3].,Liu, Jian-Min[4].,Su, Qing-Feng[5].,...&Shi, Wei-Min[8].(2006).Influence of intermittently etching on quality of CVD diamond thin films.Transactions of Nonferrous Metals Society of China (English Edition),16,s321-s323.
MLA	Yang, Kan-Cheng[1],et al."Influence of intermittently etching on quality of CVD diamond thin films".Transactions of Nonferrous Metals Society of China (English Edition) 16(2006):s321-s323.

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