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	Correlation between nitrogen incorporation and structural modification of hydrogenated carbon nitride films
	Wang, Chengbing1,2; Yang, Shengrong1; Zhang, Junyan1
刊名	Journal of non-crystalline solids
	2008-03-15
卷号	354期号:15-16页码:1608-1614
关键词	Diamond-like carbon
ISSN号	0022-3093
DOI	10.1016/j.jnoncrysol.2007.10.031
通讯作者	Yang, shengrong(sryang@lzb.ac.cn)
英文摘要	The growth and microstructure of hydrogenated carbon nitride a-cnx:h (0 <= x <= 0.10) films deposited by pecvd have been studied. upon the analysis of ftir spectra, raman spectra and xps, it is concluded that pi doping could take place even at a very low percentage of nitrogen, which favors the formation of sp(2) carbon clusters. the c 1s peak shifts toward higher binding energy while the n 1s peak remains constant as the nitrogen content in the film increases, which can be considered as a result of the chemical shifts on charge transfer due to the strong electronegativity of the n atom. 3d profile measurements show that there were a great number of particles formed when nitrogen is incorporated in to the films and the particles coalescence when the nitrogen content increases due to enhanced surface diffusion. the stress of the films converts from compressive to tensile stress gradually with increased n content. the elimination of grain boundaries and annihilation of excess vacancies, due to columnar structure increasing by diffusion leads to volume shrinkage of the film, thus causing tensile stress. these analyses were fairly consistent to help understand the effects of nitrogen in hydrogenated carbon films. (c) 2007 elsevier b.v. all rights reserved.
WOS关键词	DIAMOND-LIKE CARBON ; CHEMICAL-VAPOR-DEPOSITION ; A-C-H ; PULSED-LASER DEPOSITION ; RF PLASMA SYSTEM ; AMORPHOUS-CARBON ; THIN-FILMS ; MECHANICAL-PROPERTIES ; SUBPLANTATION MODEL ; CRYSTALLINE C3N4
WOS研究方向	Materials Science
WOS类目	Materials Science, Ceramics ; Materials Science, Multidisciplinary
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000254353300005
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2390452
专题	中国科学院大学
通讯作者	Yang, Shengrong
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Wang, Chengbing,Yang, Shengrong,Zhang, Junyan. Correlation between nitrogen incorporation and structural modification of hydrogenated carbon nitride films[J]. Journal of non-crystalline solids,2008,354(15-16):1608-1614.
APA	Wang, Chengbing,Yang, Shengrong,&Zhang, Junyan.(2008).Correlation between nitrogen incorporation and structural modification of hydrogenated carbon nitride films.Journal of non-crystalline solids,354(15-16),1608-1614.
MLA	Wang, Chengbing,et al."Correlation between nitrogen incorporation and structural modification of hydrogenated carbon nitride films".Journal of non-crystalline solids 354.15-16(2008):1608-1614.

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